High-performance Silicon Nitride Grating-coupled SPR Sensors for Gas Detection and Biosensing
Mounir Bouras
Abstract:Surface Plasmon Resonance (SPR) serves as a crucial optical technique in the realm of chemical sensing. Under specific conditions, the reflectivity of a thin metal film exhibits an exceptional sensitivity to optical changes in the medium on one side. In this investigation, we propose and simulate a plasmonic sensor incorporating a silicon nitride grating with Ag layers for the detection of solution and gas at an optical communication wavelength of 1550 nm. In both cases of the surface diffraction-grating, ther… Show more
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