1995
DOI: 10.1109/68.384515
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High-performance semiconductor optical amplifier array for self-aligned packaging using Si V-groove flip-chip technique

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Cited by 21 publications
(6 citation statements)
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“…Moreover, quantum well SOAs can have higher gain than bulk SOAs due to their quasi-2D energy bands. Polarization insensitive SOA s operating at 1.3 mm and 1.5 mm have been demonstrated using both InGaAsP/ InP and InAlGaAs/InP multi-quantum well active regions (219)(220)(221)(222)(223)(224)(225)(226).…”
Section: Semiconductor Optical Amplifiersmentioning
confidence: 99%
“…Moreover, quantum well SOAs can have higher gain than bulk SOAs due to their quasi-2D energy bands. Polarization insensitive SOA s operating at 1.3 mm and 1.5 mm have been demonstrated using both InGaAsP/ InP and InAlGaAs/InP multi-quantum well active regions (219)(220)(221)(222)(223)(224)(225)(226).…”
Section: Semiconductor Optical Amplifiersmentioning
confidence: 99%
“…The former represents "classical" microoptical systems where the light is directed through free space using lenses, gratings, or mirrors; [3] two-dimensional arrays of micromirrors, [4,5] siliconoptical-bench systems, [6,7] and three-dimensional silicon micro-optics [8] represent established examples of this category. The former represents "classical" microoptical systems where the light is directed through free space using lenses, gratings, or mirrors; [3] two-dimensional arrays of micromirrors, [4,5] siliconoptical-bench systems, [6,7] and three-dimensional silicon micro-optics [8] represent established examples of this category.…”
Section: Definitionsmentioning
confidence: 99%
“…Optical modules have been assembled on silicon substrate with various structures using different techniques primarily because it can be mass-produced with low cost process [7,[9][10][11][12][13]. The structural nature of silicon makes it possible to fabricate precise three- shapes.…”
Section: Silicon Optical Bench (Siob) Fabricationmentioning
confidence: 99%
“…The structural nature of silicon makes it possible to fabricate precise three- shapes. Anisotropic etching of bulk silicon by using wet chemical etching is widely used in the fabrication of SiOB [11][12][13]. The technology for machining <100>-and <110>oriented silicon by chemical etching is widely published in this literature [12,14] [24].…”
Section: Silicon Optical Bench (Siob) Fabricationmentioning
confidence: 99%
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