“…The former represents "classical" microoptical systems where the light is directed through free space using lenses, gratings, or mirrors; [3] two-dimensional arrays of micromirrors, [4,5] siliconoptical-bench systems, [6,7] and three-dimensional silicon micro-optics [8] represent established examples of this category. The former represents "classical" microoptical systems where the light is directed through free space using lenses, gratings, or mirrors; [3] two-dimensional arrays of micromirrors, [4,5] siliconoptical-bench systems, [6,7] and three-dimensional silicon micro-optics [8] represent established examples of this category.…”