High-Performance Polycrystalline Diamond Micro- and Nanoresonators

Sepúlveda, Nelson; Lü, Jing; Aslam, D.M.; Sullivan, John P.

doi:10.1109/jmems.2008.918409

Cited by 36 publications

(33 citation statements)

References 24 publications

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“…8 indicates that the dissipation is mainly due to the relaxation of large number of defects in the bulk or the surface of the film. Sepúlveda et al 24 reported a quality factor Q for polycrystalline diamond ͑PCD͒ ͑grain size ϳ300 nm͒ fixed-free resonators in the range of 4000-100000, which includes values higher than the Q's observed for UNCD cantilevers with comparable dimensions reported in this paper. They suggested that, as the film percentage occupied by the nucleation layer containing fine grained diamond is increased, the quality factor of the resonators is reduced.…”

Section: Dissipation In Diamondcontrasting

confidence: 50%

“…11 Recent investigation 36 of the quality factor of metalcoated UNCD fixed-fixed beams at extremely low temperatures ͑Ͻ10 K͒ indicated the presence of TLS processes. Table II summarizes the results reported by other groups [9][10][11]24,44,45 as compared to ours for different flexural beams fabricated using NCD, UNCD, or ta-C films.…”

Section: Dissipation In Diamondmentioning

confidence: 67%

“…Intrinsic dissipation processes relevant to UNCD cantilevers include thermoelastic dissipation ͑TED͒, [21][22][23] phononphonon dissipation, 24 and strain-assisted relaxation of defects. 25 Thermoelastic dissipation occurs mainly due to the temperature gradients set up by the oscillations in the solid which causes local volume changes.…”

Section: ͑2͒mentioning

confidence: 99%

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Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

et al. 2009

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We have characterized mechanical properties of ultrananocrystalline diamond UNCD thin films grown using the hot filament chemical vapor deposition HFCVD technique at 680 °C, significantly lower than the conventional growth temperature of 800 °C. The films have 4.3% sp2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, 1 m thick, exhibit a net residual compressive stress of 3701 MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 8382 GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum UHV conditions in a customized UHV atomic force microscope system to determine Young's modulus as well as mechanical dissipation of cantilever structures at room temperature. Young's modulus is found to be 79030 GPa. Based on these measurements, Poisson's ratio is estimated to be 0.0570.038. The quality factors Q of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD resonators. We have characterized mechanical properties of ultrananocrystalline diamond ͑UNCD͒ thin films grown using the hot filament chemical vapor deposition ͑HFCVD͒ technique at 680°C, significantly lower than the conventional growth temperature of ϳ800°C. The films have ϳ4.3% sp 2 content in the near-surface region as revealed by near edge x-ray absorption fine structure spectroscopy. The films, ϳ1 m thick, exhibit a net residual compressive stress of 370Ϯ 1 MPa averaged over the entire 150 mm wafer. UNCD microcantilever resonator structures and overhanging ledges were fabricated using lithography, dry etching, and wet release techniques. Overhanging ledges of the films released from the substrate exhibited periodic undulations due to stress relaxation. This was used to determine a biaxial modulus of 838Ϯ 2 GPa. Resonant excitation and ring-down measurements in the kHz frequency range of the microcantilevers were conducted under ultrahigh vacuum ͑UHV͒ conditions in a customized UHV atomic force microscope system to determine Young's modulus as well as mechanical dissipation of cantilever structures at room temperature. Young's modulus is found to be 790Ϯ 30 GPa. Based on these measurements, Poisson's ratio is estimated to be 0.057Ϯ 0.038. The quality factors ͑Q͒ of these resonators ranged from 5000 to 16000. These Q values are lower than theoretically expected from the intrinsic properties of diamond. The results indicate that surface and bulk defects are the main contributors to the observed dissipation in UNCD re...

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Section: Dissipation In Diamondcontrasting

confidence: 50%

Section: Dissipation In Diamondmentioning

confidence: 67%

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Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

et al. 2009

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“…[11,12,22] Impurity atoms, dislocations, and other defects at grain boundaries and at surfaces undergo a transition from one state to another similar to two-level systems when under stress. Dissipation in such systems exhibit Debye peaks with a characteristic relaxation time τ which is unique to that transition.…”

Section: Dissipation In Micro-cantileversmentioning

confidence: 99%

“…Stress assisted relaxation of the defects in the grain boundaries and at the surface are believed to be responsible observed dissipation. [11,12] The temperature dependence of the resonant frequency (and hence the Young's modulus) and dissipation in UNCD cantilever beams is useful for determining the nature of such defects. In this article we report the temperature dependence of frequency, hence Young's modulus and quality factor in UNCD cantilever beams grown using the HFCVD process.…”

Section: Introductionmentioning

confidence: 99%

Temperature dependence of mechanical stiffness and dissipation in ultrananocrystalline diamond

et al. 2009

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Ultrananocrystalline diamond (UNCD) films are promising for radio frequency micro electro mechanical systems (RF-MEMS) resonators due to the extraordinary physical properties of diamond, such as high Young's modulus, quality factor, and stable surface chemistry. UNCD films used for this study are grown on 150 mm silicon wafers using hot filament chemical vapor deposition (HFCVD) at 680°C. UNCD fixed free (cantilever) resonator structures designed for the resonant frequencies in the kHz range have been fabricated using conventional microfabrication techniques and are wet released. Resonant excitation and ring down measurements in the temperature range of 138 K to 300 K were conducted under ultra high vacuum (UHV) conditions in a custom built UHV AFM stage to determine the temperature dependence of Young's Modulus and dissipation (quality factor) in these UNCD cantilever structures. We measured a temperature coefficient of frequency (TCF) of 121 and 133 ppm/K for the cantilevers of 350 ìm and 400 ìm length respectively. Young's modulus of the cantilevers increased by about 3.1% as the temperature was reduced from 300 K to 138 K. This is the first such measurement for UNCD and suggests that the nanostructure plays a significant role in modifying the thermo-mechanical response of the material. The quality factor of these resonators showed a moderate increase as the cantilevers were cooled from 300 K to 138 K. The results suggest that surface and bulk defects significantly contribute to the observed dissipation in UNCD resonators. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. Ultrananocrystalline diamond (UNCD) films are promising for radio frequency micro electro mechanical systems (RF-MEMS) resonators due to the extraordinary physical properties of diamond, such as high Young's modulus, quality factor, and stable surface chemistry. UNCD films used for this study are grown on 150 mm silicon wafers using hot filament chemical vapor deposition (HFCVD) at 680°C. UNCD fixed free (cantilever) resonator structures designed for the resonant frequencies in the kHz range have been fabricated using conventional microfabrication techniques and are wet released. Resonant excitation and ring down measurements in the temperature range of 138 K to 300 K were conducted under ultra high vacuum (UHV) conditions in a custom built UHV AFM stage to determine the temperature dependence of Young's Modulus and dissipation (quality factor) in these UNCD cantilever structures. We measured a temperature coefficient of frequency (TCF) of 121 and 133 ppm/K for the cantilevers of 350 μm and 400 μm length respectively. Young's modulus of the cantilevers increased by about 3.1% as the temperature was reduced from 300 K to 138 K. This is the first such measurement for UNCD and suggests that the nanostructure plays a significant role in modifyi...

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Wide Bandgap Nanoresonators

2022

Wide Bandgap Nanowires

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High-Performance Polycrystalline Diamond Micro- and Nanoresonators

Cited by 36 publications

References 24 publications

Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

Temperature dependence of mechanical stiffness and dissipation in ultrananocrystalline diamond

Wide Bandgap Nanoresonators

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