2020
DOI: 10.1088/1361-6641/ab8537
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High performance of solution-processed SnO2 thin-film transistors by promotion of photo-exposure time-dependent carrier transport during the pre-annealing stage

Abstract: We fabricate high-performance solution-processed SnO 2 thin-film transistors (TFTs) exhibiting improved carrier transport features by exposing the ultraviolet/ozone (UV/O 3 ) on the SnO 2 film during the pre-annealing stage. The SnO 2 layer is treated with different UV/O 3 -exposure times from 0 to 60 minutes before the post-annealing step. As UV/O 3 -exposure time increases from 0 to 30 minutes, the M-O-M (M, metal; and O, oxygen) network, mass density, and oxygen vacancies of films are enhanced. In contrast,… Show more

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Cited by 7 publications
(9 citation statements)
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“…UVO, in particular, causes a photochemical reaction known as the Chapman cycle in ambient air. Equations and are related to the formation of ozone, whereas eqs and present the destruction process of ozone normalO 2 λ 0.25em < 0.25em 240 0.25em nm 2 normalO normalO + normalO 2 normalO 3 normalO 3 λ 0.25em < 0.25em 300 0.25em nm normalO 2 + normalO normalO + normalO 3 2 normalO 2 …”
Section: Resultsmentioning
confidence: 99%
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“…UVO, in particular, causes a photochemical reaction known as the Chapman cycle in ambient air. Equations and are related to the formation of ozone, whereas eqs and present the destruction process of ozone normalO 2 λ 0.25em < 0.25em 240 0.25em nm 2 normalO normalO + normalO 2 normalO 3 normalO 3 λ 0.25em < 0.25em 300 0.25em nm normalO 2 + normalO normalO + normalO 3 2 normalO 2 …”
Section: Resultsmentioning
confidence: 99%
“…UVO, in particular, causes a photochemical reaction known as the Chapman cycle in ambient air. Equations and are related to the formation of ozone, whereas eqs and present the destruction process of ozone …”
Section: Resultsmentioning
confidence: 99%
“…19,32 In addition, increased film thickness can also affect mobility since it is proportional to the carrier concentration per unit accumulation area. 24 However, for the 0.10 M Sn concentration, changing the number of layers of the channel did not significantly change the thickness of the film (14.1 and 19.1 nm for the 2 and 3 layers, respectively). This signifies that the 2-layer film is still porous and that the additional layer of spin coating just fills in the holes present in the existing film.…”
mentioning
confidence: 83%
“…By using a combustion route, this work aims to produce a good metal oxide network with few chloride and carbon impurities at a low fabrication temperature of 300 °C. In addition, the operating drain voltage usually required to switch on SnO 2 TFT is very high, usually at 20–30 V, due to the Schottky barrier between SnO 2 and Au S/D electrodes. To drive the operating voltage lower, high- k dielectric materials were employed in SnO 2 TFTs, and others have tried to utilize ultrathin SnO 2 layers as well. Moreover, previous works on solution-processed SnO 2 TFTs report on V ON values that are always in depletion mode, which means that the transistor is already turned on at negative voltages. ,− In real device applications, this is not ideal because it will require a high energy to turn off the device. By effective control of the carrier concentration, the transistor device can be switched on at a voltage close to zero.…”
Section: Introductionmentioning
confidence: 99%
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