High-performance nanopattern triboelectric generator by block copolymer lithography

Kim, Daewon; Jeon, Seungwon; Kim, Ju Young; Seol, Myeong‐Lok; Kim, Sang Ouk; Choi, Yang‐Kyu

doi:10.1016/j.nanoen.2015.01.008

Cited by 153 publications

(91 citation statements)

References 42 publications

(41 reference statements)

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“…An interesting demonstration by Kim et al [ 80 ] in 2015 described the use of BCP nanopatterning for triboelectric generator application. Triboelectric nanogenerators have gained interest for energy harvesting and BCP patterning has been proposed due to the associated low device fabrication costs.…”

Section: Reviewmentioning

confidence: 99%

“…e-h) Reproduced with permission. [ 118 ] [53,55,60,80,97] Co posts, [58] Co nanorings, [61] Fe posts, [63] Cr posts [59,73] aligned Al and Au nanowires, [64] Ge nanowires, [68] Al 2 O 3 dots, [66] Ti/Pt dots [85] On-chip etch mask, [44] ferromagnetic nanorings, [61] carbon nanotube growth, [63] metal nanodot memory device, [73] triboelectric generator, [62] resistive switching nanodevice, [85] plasmonic, [97] Atomic layer deposition Al 2 O 3 line and hole spacer, [94] Al 2 O 3 wires and posts [95,96] On-chip etch mask [96] Sequential infi ltration synthesis Al 2 O 3 posts, [111 , 116-120 , 122] Al 2 O 3 wires, [111][112][113][114][115][116] TiO 2 wires, [111] SiO 2 posts, [112] SiO 2 wires, [112] W wires, [112] ZnO posts, [116] ZnO wires [112,116] On-chip etch mask, [113-115 , 117,118] SIS procedure for PS block selectivity, [116] superhydrophobicity, [117,118] anti-refl ec...…”

Section: Reviewmentioning

confidence: 99%

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Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application

et al. 2016

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Block copolymers (BCPs) and their directed self-assembly (DSA) has emerged as a realizable complementary tool to aid optical patterning of device elements for future integrated circuit advancements. Methods to enhance BCP etch contrast for DSA application and further potential applications of inorganic nanomaterial features (e.g., semiconductor, dielectric, metal and metal oxide) are examined. Strategies to modify, infiltrate and controllably deposit inorganic materials by utilizing neat self-assembled BCP thin films open a rich design space to fabricate functional features in the nanoscale regime. An understanding and overview on innovative ways for the selective inclusion/infiltration or deposition of inorganic moieties in microphase separated BCP nanopatterns is provided. Early initial inclusion methods in the field and exciting contemporary reports to further augment etch contrast in BCPs for pattern transfer application are described. Specifically, the use of evaporation and sputtering methods, atomic layer deposition, sequential infiltration synthesis, metal-salt inclusion and aqueous metal reduction methodologies forming isolated nanofeatures are highlighted in di-BCP systems. Functionalities and newly reported uses for electronic and non-electronic technologies based on the inherent properties of incorporated inorganic nanostructures using di-BCP templates are highlighted. We outline the potential for extension of incorporation methods to triblock copolymer features for more diverse applications. Challenges and emerging areas of interest for inorganic infiltration of BCPs are also discussed.

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Section: Reviewmentioning

confidence: 99%

Section: Reviewmentioning

confidence: 99%

Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application

et al. 2016

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“…Although numerous research groups have suggested various approaches for modifying the surface morphologies on the nanometer scale for the purpose of improving the output power of TENGs, significant limitations remain, such as poor controllability, restricted material selection, lack of topological order, and irrevocable morphologies . To improve the performance of TENGs further, BCP self‐assembly has emerged as an alternative method to achieve tunable nanoscale patterns based on rings, holes, lines, and dots …”

Section: Energy Devices For Self‐powered Applicationmentioning

confidence: 99%

Performance Enhancement of Electronic and Energy Devices via Block Copolymer Self‐Assembly

et al. 2015

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The use of self-assembled block copolymers (BCPs) for the fabrication of electronic and energy devices has received a tremendous amount of attention as a non-traditional approach to patterning integrated circuit elements at nanometer dimensions and densities inaccessible to traditional lithography techniques. The exquisite control over the dimensional features of the self-assembled nanostructures (i.e., shape, size, and periodicity) is one of the most attractive properties of BCP self-assembly. Harmonic spatial arrangement of the self-assembled nanoelements at desired positions on the chip may offer a new strategy for the fabrication of electronic and energy devices. Several recent reports show the great promise in using BCP self-assembly for practical applications of electronic and energy devices, leading to substantial enhancements of the device performance. Recent progress is summarized here, with regard to the performance enhancements of non-volatile memory, electrical sensor, and energy devices enabled by directed BCP self-assembly.

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“…Therefore, considerable efforts have been thus made to increase the amount of tribocharges on the surface. Previous research approaches can be largely divided into three categories such as material pair selection [63][64][65][66][67], device structural design [68][69][70][71][72][73], and surface modification [74][75][76][77][78][79][80][81][82][83][84]. First, from the viewpoint of material pair election, all materials have the different triboelectric polarity, which means that they have the relative tendency to accept or donate surface charges during contacts [55,66].…”

Section: Introductionmentioning

confidence: 99%

“…This method is an effective way to further maximize the output performance of the optimized device with material selection and structural optimization. The physical modification refers to the increase of contact surface area through the introduction of micro-/nano-structures [66,75,[77][78][79][80]. This contributes to the increase of the total transferred charges.…”

Section: Introductionmentioning

confidence: 99%

Modulation of surface physics and chemistry in triboelectric energy harvesting technologies

Lee

Kim

Park

et al. 2019

Science and Technology of Advanced Materials

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Mechanical energy harvesting technology converting mechanical energy wasted in our surroundings to electrical energy has been regarded as one of the critical technologies for self-powered sensor network and Internet of Things (IoT). Although triboelectric energy harvesters based on contact electrification have attracted considerable attention due to their various advantages compared to other technologies, a further improvement of the output performance is still required for practical applications in next-generation IoT devices. In recent years, numerous studies have been carried out to enhance the output power of triboelectric energy harvesters. The previous research approaches for enhancing the triboelectric charges can be classified into three categories: i) materials type, ii) device structure, and iii) surface modification. In this review article, we focus on various mechanisms and methods through the surface modification beyond the limitations of structural parameters and materials, such as surficial texturing/patterning, functionalization, dielectric engineering, surface charge doping and 2D material processing. This perspective study is a cornerstone for establishing next-generation energy applications consisting of triboelectric energy harvesters from portable devices to power industries.

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High-performance nanopattern triboelectric generator by block copolymer lithography

Cited by 153 publications

References 42 publications

Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application

Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application

Performance Enhancement of Electronic and Energy Devices via Block Copolymer Self‐Assembly

Modulation of surface physics and chemistry in triboelectric energy harvesting technologies

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