2014
DOI: 10.1002/smll.201402841
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High‐Performance Hybrid Complementary Logic Inverter through Monolithic Integration of a MEMS Switch and an Oxide TFT

Abstract: A hybrid complementary logic inverter consisting of a microelectromechanical system switch as a promising alternative for the p-type oxide thin film transistor (TFT) and an n-type oxide TFT is presented for ultralow power integrated circuits. These heterogeneous microdevices are monolithically integrated. The resulting logic device shows a distinctive voltage transfer characteristic curve, very low static leakage, zero-short circuit current, and exceedingly high voltage gain.

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Cited by 12 publications
(8 citation statements)
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“…Thin-film transistors (TFTs) based on organic or metal oxide semiconductors have received great interest as low-cost alternatives to traditional silicon-based devices due to their large-area capability and relatively low processing temperatures. Practical circuit designs require the integration of p - and n -type TFTs to fabricate complementary logic devices that have low power consumption and provide robust device operation. , Organic TFTs are particularly useful for p -type components, while metal oxide TFTs are promising n -type counterparts. Recently, significant efforts have been devoted to developing high-performance solution-processed metal oxide semiconductors, such as In 2 O 3 , InZnO, and InGaZnO. However, all these materials contain a considerable amount of indium, which is scarce and expensive, making widespread utilization of indium-containing materials in mass-produced electronic devices unlikely. It is therefore desirable to develop metal oxide TFTs based on resource-friendly materials, such as ZnO, which is naturally abundant and cost-efficient …”
Section: Introductionmentioning
confidence: 99%
“…Thin-film transistors (TFTs) based on organic or metal oxide semiconductors have received great interest as low-cost alternatives to traditional silicon-based devices due to their large-area capability and relatively low processing temperatures. Practical circuit designs require the integration of p - and n -type TFTs to fabricate complementary logic devices that have low power consumption and provide robust device operation. , Organic TFTs are particularly useful for p -type components, while metal oxide TFTs are promising n -type counterparts. Recently, significant efforts have been devoted to developing high-performance solution-processed metal oxide semiconductors, such as In 2 O 3 , InZnO, and InGaZnO. However, all these materials contain a considerable amount of indium, which is scarce and expensive, making widespread utilization of indium-containing materials in mass-produced electronic devices unlikely. It is therefore desirable to develop metal oxide TFTs based on resource-friendly materials, such as ZnO, which is naturally abundant and cost-efficient …”
Section: Introductionmentioning
confidence: 99%
“…Consequently, owing to this strain transduction mechanism, internal voltage amplifies, and the device achieve steep SS below 60 mv/dec This study provides a numerical advancement for postsilicon, energy efficient, and scalable technology to harvest future low-power devices. 256 Several others' steepslopes device concepts have been reported, for instance impact ionization-based FETs, 257,258 MEMS logic switch, 259 and spinbased FETs. 260,261 Among all proposed devices, TFETs are most promising as they experimentally demonstrate sub-60 mV/dec.…”
Section: Other Competitive Concepts For Steep-slope Transistorsmentioning
confidence: 99%
“…Many efforts have been made to modify the SS in recent years, including altering the carrier injection mode from diffusion to tunneling-based mechanisms 3 6 or mechanical switching operations 7 , 8 . One such mechanism for overcoming the aforementioned limitation is utilizing impact ionization 9 11 .…”
Section: Introductionmentioning
confidence: 99%