High-Performance Flux Tracking Controller for Reluctance Actuator
Yang Liu,
Qian Miao,
Yue Dong
Abstract:To meet the ever-increasing demand for next-generation lithography machines, the actuator plays an important role in the achievement of high acceleration of the wafer stage. However, the voice coil motor, which is widely used in high-precision positioning systems, is reaching its physical limits. To tackle this problem, a novel way to design the actuator using the magnetoresistance effect is argued due to the high force densities. However, the strong nonlinearity limits its application in the nan-positioning s… Show more
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