2023
DOI: 10.1021/acs.chemmater.3c02237
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High-Performance Fiber-Shaped Vertical Organic Electrochemical Transistors Patterned by Surface Photolithography

Yueheng Zhong,
Qicheng Liang,
Zhu Chen
et al.

Abstract: Converging the fibrous flexibility and resilience with the advantageous electrical properties of organic electrochemical transistors (OECTs), fiber-shaped OECTs possess great potential in wearable electronics. However, limited by current highly recognized fabrication techniques for film devices, micrometer-scale patterning capability of electrodes and semiconductor channels on the curved surface of fibers is still challenging. In addition, the well-defined short channel length of fibershaped OECTs is highly de… Show more

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Cited by 5 publications
(2 citation statements)
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“…Traditional lithography technology typically involves coating a substrate with a light-sensitive photoresist, exposing it to ultraviolet (UV) light through a patterned mask, etching uncovered areas and stripping the photoresist to reveal a patterned substrate, which is mainly applicable to flat and rigid surfaces. To this end, a rotating lithography technology was developed to solve the processing issues of lithography on curved surfaces [ 5 , 6 ]. In a typical rotating lithography process, the outer surface of the cylindrical fiber is gradually scanned and patterned by a linear UV light source by controlling the axial rotation of the fiber.…”
mentioning
confidence: 99%
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“…Traditional lithography technology typically involves coating a substrate with a light-sensitive photoresist, exposing it to ultraviolet (UV) light through a patterned mask, etching uncovered areas and stripping the photoresist to reveal a patterned substrate, which is mainly applicable to flat and rigid surfaces. To this end, a rotating lithography technology was developed to solve the processing issues of lithography on curved surfaces [ 5 , 6 ]. In a typical rotating lithography process, the outer surface of the cylindrical fiber is gradually scanned and patterned by a linear UV light source by controlling the axial rotation of the fiber.…”
mentioning
confidence: 99%
“… (a) Lithography technology for semiconductor fibers. (I) Rotating lithography process for curved surface on fiber [ 5 , 6 ]. (II) Methods of lithography on profiled fibers [ 7 ].…”
mentioning
confidence: 99%