High-performance FBAR humidity sensor based on the PI film as the multifunctional layer

Liu, Jihang; Zhao, Zhan; Fang, Zhen; Liu, Zhenyu; Zhu, Yusi; Du, Lidong

doi:10.1016/j.snb.2020.127694

Cited by 35 publications

(18 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…To obtain a wearable E‐skin, it is necessary to choose flexible material as the substrate. Therefore, researchers usually use polymer materials as the substrate, such as polyurethane, 31 polydimethylsiloxane, 32,33 and polyimide 34,35 . However, the traditional synthetic polymer materials have some problems, such as difficulty in biodegradation, poor biocompatibility, and nonrenewability.…”

Section: Introductionmentioning

confidence: 99%

Flexible and sensitive piezoresistive electronic skin based on TOCN/PPy hydrogel films

Gao

Liu

Xie

et al. 2021

J of Applied Polymer Sci

View full text Add to dashboard Cite

In recent years, the wearable electronic skin (E‐skin) has attracted more and more attention due to high sensitivity, good portability and flexibility. In this work, we used the 2,2,6,6‐tetramethylpiperidinyl‐1‐oxyl (TEMPO)‐oxidized cellulose nanofibril (TOCN) as the substrate, and used the in‐situ polymerization method to introduce polypyrrole (PPy) into the TOCN substrate. Then, the nylon gauze was used as microstructure template to prepare a TOCN/PPy E‐skin with a surface microstructure. This E‐skin possessed excellent sensing and mechanical properties. In the pressure range of 0–600 Pa, the sensitivity of E‐skin was 3.13 kPa−1. In addition, the E‐skin exhibited ultrafast response/recovery time (≤10 ms), ultralow detection limit of 0.3 Pa, good stability (>9000 cycles) and mechanical strength of up to 117 MPa. Therefore, the TOCN/PPy E‐skin has broad development prospects in the fields of artificial intelligence and health monitoring.

show abstract

Section: Introductionmentioning

confidence: 99%

Flexible and sensitive piezoresistive electronic skin based on TOCN/PPy hydrogel films

Gao

Liu

Xie

et al. 2021

J of Applied Polymer Sci

View full text Add to dashboard Cite

show abstract

“…In the past two decades, single-resonator-based (SRB) Micro-Electro-Mechanical-Systems (MEMS) sensors have been extensively studied for detecting small physical or chemical perturbations, such as pressure [1][2][3][4][5][6][7][8], rotational rate [9][10][11][12][13][14], acceleration [15][16][17], vibration [18][19][20], force [21][22][23], chemical vapor [24][25][26], and biological material [27][28][29][30][31][32][33][34]. Various structures, such as flexural mode resonators (FMR) [28,31,35], surface acoustic wave resonators (SAW) [36], bulk acoustic resonators (BAR) [6,12,[24][25][26]37], lamb wave resonators (LWR) [8,14,38], etc., have been fabricated to enable these SRB sensors to ha...…”

Section: Introductionmentioning

confidence: 99%

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

et al. 2021

Self Cite

View full text Add to dashboard Cite

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.

show abstract

“…Being similar with QCM, the film bulk acoustic wave resonator (FBAR) is a microelectromechanical system (MEMS)-based bulk acoustic wave micro device. According to the Sauerbrey equation, a FBAR sensor, resonating at the gigahertz range, offers higher sensitivity than QCM, which has the resonating frequency at several megahertz [ 29 , 30 , 31 , 32 , 33 ]. We are quite interested in applying FBAR gas sensors as GC detectors and have firstly reported the facile hyphenation of the FBARs with GC [ 34 , 35 ].…”

Section: Introductionmentioning

confidence: 99%

In-Line Detection with Microfluidic Bulk Acoustic Wave Resonator Gas Sensor for Gas Chromatography

Duan

2021

Sensors

View full text Add to dashboard Cite

A microfluidic film bulk acoustic wave resonator gas sensor (mFBAR) adapted specifically as an in-line detector in gas chromatography was described. This miniaturized vapor sensor was a non-destructive detector with very low dead volume (0.02 μL). It was prepared by enclosing the resonator in a microfluidic channel on a chip with dimensions of only 15 mm × 15 mm × 1 mm. The device with polymer coating showed satisfactory performance in the detection of organophosphorus compound, demonstrating a very low detection limit (a dozen parts per billion) with relatively short response time (about fifteen seconds) toward the simulant of chemical warfare agent, dimethyl methylphosphonate. The in-line detection of the mFBAR sensor with FID was constructed and employed to directly measure the concentration profile on the solid surface by the mFBAR with the controlled concentration profile in the mobile phase at the same time. The difference of peak-maximum position between mobile phase and solid phase could be a convenient indicator to measure mass transfer rate. With the response of the mFBAR and FID obtained in one injection, an injection mass-independent parameter can be calculated and used to identify the analyte of interest.

show abstract

High-performance FBAR humidity sensor based on the PI film as the multifunctional layer

Cited by 35 publications

References 20 publications

Flexible and sensitive piezoresistive electronic skin based on TOCN/PPy hydrogel films

Flexible and sensitive piezoresistive electronic skin based on TOCN/PPy hydrogel films

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

In-Line Detection with Microfluidic Bulk Acoustic Wave Resonator Gas Sensor for Gas Chromatography

Contact Info

Product

Resources

About