High-performance etching of multilevel phase-type Fresnel zone plates with large apertures

Guo, Chengli; Zhang, Zhe; Xue, Desheng; Li, Longxiang; Wang, Ruoqiu; Zhou, Xiaoguang; Zhang, Feng; Zhang, Xuejun

doi:10.1016/j.optcom.2017.09.006

Cited by 20 publications

(2 citation statements)

References 25 publications

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“…As a kind of high-performance engineering polymer, polyimides (PIs) are ubiquitously employed dominantly as thermal control coating, protective surfaces, film mirrors, film DOE 3,11,12 and solar cell matrices in aerospace field, owing to its inherent good mechanical properties, resistance to chemicals, desirable dielectric permittivity, 13 and high-temperature stability. 6 Therefore, PI can be used as a compromise material for the matrix.…”

Section: Introductionmentioning

confidence: 99%

Facile method for fabricating atomic oxygen resistant polyimide films with excellent optical homogeneity containing hyperbranched polysiloxane

Xie

Mao

et al. 2020

High Performance Polymers

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Mechanically robust optical homogeneous polyimide (PI) films with desirable atomic oxygen (AO) erosion duration were fabricated by initially synthesizing amine-functionalized hyperbranched polysiloxane (NH2-HBPSi), then reinforcing the pristine polyimide skeleton with it via copolycondensation reactions. NH2-HBPSi macromolecule imparts desirable AO survivability to the resulting hybrids. The mass loss per unit area of hybrid films had a downward trend with rising NH2-HBPSi content and AO dose before the complete silica protective layer was formed. It has been proven by the experiments in an underground simulated AO environment. It decreased to 1% of that of pristine polyimide when NH2-HBPSi accounted for 30% of the solid content after 24 h AO attack. The stable thickness uniformity that can meet the Rayleigh criterion was achieved in a 30 wt% HBPSi PI film, mainly due to the selection of the best process parameters. Meanwhile, 30 wt% HBPSi PI demonstrates satisfactory mechanical properties, with a tensile strength of 228.9 MPa and elongation at break of 7.3%. The characterization of scanning electron microscopy confirmed that pristine polyimide was substantially eroded after AO exposure while the surface morphology of 30 wt% HBPSi polyimide showed no evident change. The low AO erosion yield and prominent film thickness uniformity may find extensive usage in ultra-lightweight space diffractive optical elements (DOE) working in low earth orbit (LEO).

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Section: Introductionmentioning

confidence: 99%

Facile method for fabricating atomic oxygen resistant polyimide films with excellent optical homogeneity containing hyperbranched polysiloxane

Xie

Mao

et al. 2020

High Performance Polymers

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“…However, there are only two degrees-of-freedom (DOFs) in design for these ultra-thin binary amplitude FZPs, the photo-mask design and optical transmittance. The binary-phase FZPs are known to improve the optical efficiency by ~40% compared with the amplitude FZPs but require more complex fabrication; the concentric ring grooves should be etched in a transparent dielectric film (e.g., SiO2 and Si3N4) to have a binary phase step of  [29][30][31][32].…”

Section: Introductionmentioning

confidence: 99%

Transferable ultra-thin multi-level micro-optics patterned by tunable photoreduction and photoablation for hybrid optics

Lee

Low

Lim

et al. 2019

Carbon

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High‐Efficiency Multilevel Phase Lenses with Nanostructures on Polyimide Membranes

Howe,

Rajapaksha,

Ellepola

et al. 2024

Advanced Optical Materials

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The emergence of planar meta‐lenses on flexible materials has profoundly impacted the long‐standing perception of diffractive optics. Despite their advantages, these lenses still face challenges in design and fabrication to obtain high focusing efficiency and resolving power. A nanofabrication technique is demonstrated based on photolithography and polyimide casting for realizing membrane‐based multilevel phase‐type Fresnel zone plates (FZPs) with high focusing efficiency. By employing advantageous techniques, these lenses with nanostructures are directly patterned into thin polyimide membranes. The computational and experimental results have indicated that the focusing efficiency of these nanostructures at the primary focus increases significantly with increasing the number of phase levels. Specifically, 16‐level phase lenses on a polyimide membrane can achieve a focusing efficiency of more than 91.6% of the input signal (9.5 times better than that of a conventional amplitude‐type FZP) and focus light into a diffraction‐limited spot together with very weak side‐lobes. Furthermore, these lenses exhibit considerably reduced unwanted diffraction orders and produce extremely low background signals. The potential impact of these lenses extends across various applications and techniques including microscopy, imaging, micro‐diffraction, remote sensing, and space flight instruments which require lightweight and flexible configurations.

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High-performance etching of multilevel phase-type Fresnel zone plates with large apertures

Cited by 20 publications

References 25 publications

Facile method for fabricating atomic oxygen resistant polyimide films with excellent optical homogeneity containing hyperbranched polysiloxane

Facile method for fabricating atomic oxygen resistant polyimide films with excellent optical homogeneity containing hyperbranched polysiloxane

Transferable ultra-thin multi-level micro-optics patterned by tunable photoreduction and photoablation for hybrid optics

High‐Efficiency Multilevel Phase Lenses with Nanostructures on Polyimide Membranes

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