2014
DOI: 10.1177/1094342014560591
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High-performance atomistic modeling of optical thin films deposited by energetic processes

Abstract: In this paper we present a computationally effective approach to classical molecular dynamic simulation of thin film growth with orientation on cluster supercomputing facilities. The goal of the developed approach is to investigate structural heterogeneities of thin films deposited on substrates at a nanoscale level. These heterogeneities depend on the experimental conditions of a deposition process being used. They have essential influence on practical properties of thin films and their modeling is important … Show more

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Cited by 26 publications
(20 citation statements)
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“…The time of MD simulation of one injection cycle depends linearly on the number of deposited atoms N at and the total time of the deposition process simulation is proportional to the square of the N at [2]. This is a reason for a relatively high computational cost of the simulation procedure as compared to the MD simulation of clusters consisting of fixed numbers of atoms.…”
Section: Resultsmentioning
confidence: 99%
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“…The time of MD simulation of one injection cycle depends linearly on the number of deposited atoms N at and the total time of the deposition process simulation is proportional to the square of the N at [2]. This is a reason for a relatively high computational cost of the simulation procedure as compared to the MD simulation of clusters consisting of fixed numbers of atoms.…”
Section: Resultsmentioning
confidence: 99%
“…The simulation of the silicon dioxide thin film deposition is organized as a step-by-step procedure [2][3][4][5]. At every deposition step, SiO 2 groups are injected at the top of the simulation box and are directed to the film surface.…”
Section: Simulation Methodsmentioning
confidence: 99%
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