High-overtone, bulk acoustic resonator frequency stability improvements

Caldwell, S.P.; Driscoll, M.M.; Stansberry, S. D.; Bailey, D.S.; Salvo, H.L.

doi:10.1109/freq.1993.367472

Cited by 8 publications

(2 citation statements)

References 4 publications

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“…Piezoelectric transduction is widely employed in MEMS devices largely due to high transduction efficiency compared to electrostatic capacitive transduction. The resonators chosen for the purpose of this study are thickness mode resonators, that find applications in several areas such as low loss RF filters [1], acoustic stress generators [2], frequency stabilization [3], bio-sensing [4] and several other sensor applications [5]. High Overtone Bulk Acoustic Resonators (HBARs) are commmonly used thickness mode resonators, and offer the ability to have discrete tuning capability thanks to multiple acoustic resonances, with a fixed frequency spacing (defined by piezoelectric layer thickness) spread over a wide frequency range.…”

Section: Introductionmentioning

confidence: 99%

Large $d_{33}$ Piezoelectric-Polymer Composites For RF Acoustic Resonators

Das,

Tallur

2019

Preprint

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While piezoelectric transduction enables designing acoustic resonators operating at multi-GHz frequencies, the deposition of piezoelectric materials typically requires high temperature processes and specific crystallographic orientation of substrates, thus imposing a limitation on materials that could be used. In this paper we present a piezoelectrically transduced thickness mode acoustic resonator that employs piezoelectric (PMNPT) nanoparticles embedded in a polymer (SU8) matrix. This composite material is deposited using standard resist-spin coaters and is thus compatible with a variety of substrates. The device presented here uses a double side polished single crystal silicon wafer as the low loss acoustic substrate for the resonator and 1.7µm thick SU8-PMNPT composite film as the actuator, and exhibits large effective piezoelectric coefficient (d 33 ) of 216pm/V , and we experimentally demonstrate efficient transduction of acoustic resonances at frequencies up to 1.5GHz.

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Section: Introductionmentioning

confidence: 99%

Large $d_{33}$ Piezoelectric-Polymer Composites For RF Acoustic Resonators

Das,

Tallur

2019

Preprint

View full text Add to dashboard Cite

show abstract

“…However, problems still exist for selecting the layer orientation to favor specific mode polarization and select propagation characteristics (velocity, coupling, temperature sensitivity, etc.). Moreover, for given applications, deposited films reveal incapable to reach the characteristics of monolithic substrates [4].…”

Section: Introductionmentioning

confidence: 99%