2015
DOI: 10.1063/1.4935026
|View full text |Cite
|
Sign up to set email alerts
|

High mobility, dual layer, c-axis aligned crystalline/amorphous IGZO thin film transistor

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
19
0

Year Published

2016
2016
2020
2020

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 43 publications
(20 citation statements)
references
References 27 publications
0
19
0
Order By: Relevance
“…Fig.1 shows a classification of crystal structures on IGZO ceramics. In previous works, we have discovered novel crystal morphologies for such materials, including c-axis-aligned crystalline IGZO (CAAC-IGZO) and nanocrystalline IGZO (nc-IGZO), which differ from single-crystalline and amorphous IGZO [9][10][11][12][13][14][15][16][17][18]. According to Kimizuka [32], CAAC-IGZO and nc-IGZO have a structure with an "intermediate state" between an amorphous structure and a crystal structure.…”
Section: Background and Objectivementioning
confidence: 99%
“…Fig.1 shows a classification of crystal structures on IGZO ceramics. In previous works, we have discovered novel crystal morphologies for such materials, including c-axis-aligned crystalline IGZO (CAAC-IGZO) and nanocrystalline IGZO (nc-IGZO), which differ from single-crystalline and amorphous IGZO [9][10][11][12][13][14][15][16][17][18]. According to Kimizuka [32], CAAC-IGZO and nc-IGZO have a structure with an "intermediate state" between an amorphous structure and a crystal structure.…”
Section: Background and Objectivementioning
confidence: 99%
“…We have developed our own equipment to automate this separation process, making this technology suitable for mass production [7]. The FETs use c-axis-aligned crystalline indium gallium zinc oxide [8][9][10][11][12][13], and color display is achieved with a "white tandem OLED, top emission, and color filter" (WTC) structure [14][15][16]. Transparent electrodes with different thicknesses for different colors are provided on reflective electrodes, i.e., a microcavity structure is employed.…”
Section: Kawara-type Multidisplaymentioning
confidence: 99%
“…We discovered CAAC-IGZO and nanocrystalline IGZO (nc-IGZO), which have crystal morphologies different from those of single crystal and amorphous IGZOs [9][10][11][12]. Cornell University has also investigated CAAC-OS [13][14][15][16][17][18]. In CAAC-IGZO films, atomic arrangement parallel to a substrate surface is observed by cross-sectional transmission electron microscopy (TEM).…”
Section: Introductionmentioning
confidence: 99%