High Intensity Argon Cluster Beams Formation for Technological Processes

Korobeishchikov, N. G.; Zarvin, A. E.; Kaljada, Valeriy; Khodakov, M. D.

doi:10.54362/1818-7919-2012-7-2-85-92

Sib. fiz. ž.

2012

DOI: 10.54362/1818-7919-2012-7-2-85-92

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High Intensity Argon Cluster Beams Formation for Technological Processes

N. G. Korobeishchikov

A. E. Zarvin

Valeriy Kaljada

et al.

Abstract: Modernization of experimental complex LEMPUS-1 was done. Experimental investigations of argon cluster beams formation for ion-cluster surface modification technology were performed. Intensity of cluster beams up to 5*1014 clusters per cm2 per sec with average cluster size about 1300 was obtained. It was found the optimal conditions for cluster beam formation

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High Intensity Argon Cluster Beams Formation for Technological Processes

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