High Frequency Optical Probe for BAW/SAW Devices

Chambon, Hugo; Nicolay, Pascal; Moldaschl, Thomas; Zauner, Markus; Humbert, Claude; AminAwan, Aoun; Schiek, Maximilian; Metzger, Thomas; Benjeddou, Ayech

doi:10.1109/ultsym.2018.8580056

Cited by 2 publications

(2 citation statements)

References 5 publications

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“…with the elementary charge q e and photocurrent amplitude î from (1). From this inequation, the shot-noise-limited detection can theoretically be performed for vibration frequencies:…”

Section: Transition To Shot-noise-limited Ldv Measurementmentioning

confidence: 99%

“…With the steadily-increasing demands for broadband telecommunications, highly selective radio-frequency microelectromechanical (RF-MEM) filters have been developed with microacoustic vibrations at frequencies up to several GHz [1] and vibration amplitudes of few nanometers or less. The Original Content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence.…”

Section: Introductionmentioning

confidence: 99%

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Heterodyne interferometry at ultra-high frequencies with frequency-offset-locked semiconductor lasers

Kowarsch

Rembe

2020

Meas. Sci. Technol.

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Modern broadband telecommunications require microelectromechanical filters which mechanically vibrate at ultra-high frequencies up to several gigahertz. Heterodyne interferometers, so-called laser-Doppler vibrometers (LDVs), provide a sensitive and contactless measurement technique for vibrations in such filters, but are limited in GHz heterodyning by the efficiency drop of acousto-optic frequency shifters. Heterodyning by frequency-offset locking of two lasers in an optoelectronic phase-locked loop (OPLL) overcomes this limitation. This is demonstrated with our LDV setup with heterodyning up to 1.4 G H z via offset locking of two semiconductor lasers at visible wavelength. The experiments show a vibration-amplitude resolution of less than 1 p m per H z for frequencies higher than 50 M H z up to 700 M H z . The bandwidth is only limited by our photodetectors. This amplitude resolution already qualifies our LDV for vibration measurement of microelectromechanical filters at ultra-high frequencies. We present a comprehensive model for the vibration-amplitude resolution of a LDV with this technique including the laser linewidths, the OPLL transfer function, and interferometer delays. The experiments with our LDV validate the model predictions from numerical simulations. Finally, we discuss the collapse of the heterodyne carrier at vanishing mutual coherence due to interferometer delays, the transition to shot-noise-limited detection, and provide design recommendations.

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“…with the elementary charge q e and photocurrent amplitude î from (1). From this inequation, the shot-noise-limited detection can theoretically be performed for vibration frequencies:…”

Section: Transition To Shot-noise-limited Ldv Measurementmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Heterodyne interferometry at ultra-high frequencies with frequency-offset-locked semiconductor lasers

Kowarsch

Rembe

2020

Meas. Sci. Technol.

View full text Add to dashboard Cite

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Dynamic displacement measurement beyond half-wavelength in phase-modulated optical interferometer

2020

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We demonstrate an interference signal-processing method that extends the measurement range of dynamic displacement beyond half the wavelength of light without deteriorating the measurement accuracy in a phase-modulated optical interferometer. The measurement range extension is realized by the algorithm focusing on peak direction of the interference signal waveform. Deterioration of measurement accuracy is avoided by the data processing that removes noisy data sets. Performance of the proposed system is evaluated by the experiments using a pseudo-vibrator composed of a phase modulator. In the experiments using a lead zirconate titanate (PZT) device as a sample, we successfully measure the dynamic displacement of up to 3127 nm, which is larger than the light source wavelength of 1537 nm. Proof-of-principle simulations, including the evaluation of the measurement error, are also conducted, the results of which show that the measurement error of the proposed method is small in principle.

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High Frequency Optical Probe for BAW/SAW Devices

Cited by 2 publications

References 5 publications

Heterodyne interferometry at ultra-high frequencies with frequency-offset-locked semiconductor lasers

Heterodyne interferometry at ultra-high frequencies with frequency-offset-locked semiconductor lasers

Dynamic displacement measurement beyond half-wavelength in phase-modulated optical interferometer

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