High-frequency noise suppression in downsized circuits using magnetic granular films

Yoshida, Seikoh; Ono, Hiroshi; Ando, S.; Tsuda, F.; Ito, Tetsuo; Shimada, Yusuke; Yamaguchi, Masahiro; Arai, Ken Ichi; Ohnuma, S.; Masumoto, T.

doi:10.1109/20.951185

Cited by 94 publications

(46 citation statements)

References 2 publications

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“…[1][2][3] As far as the CMOS-integrated magnetic and electro-magnetic devices are concerned, soft magnetic layers (typically several microns thick) with tunable uniaxial anisotropy are key for applications requiring operation from high to ultra-high frequencies (from a few MHz to several GHz) and low power consumption. 4,5 These films should have high saturation magnetization (M s ) and electrical resistivity (ρ), and a well-defined anisotropy with a specific in-plane EA and anisotropy constant (K u ). 6 The AC permeability (µ) perpendicular to EA remains largely constant up to the ferromagnetic resonance (FMR) frequency of the material (f r ∼ √ H k 4πM s , where H k is the anisotropy field).…”

Section: Introductionmentioning

confidence: 99%

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Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications

Falub¹,

Rohrmann²,

Bless³

et al. 2017

AIP Advances

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Innovative soft magnetic multilayers with enhanced in-plane anisotropy and ferromagnetic resonance frequency for integrated RF passive devices AIP Advances 8, 048002 (2018) dielectric interlayers were deposited on 8" Si wafers using DC, pulsed DC and RF cathodes in the industrial, high-throughput Evatec LLS-EVO-II magnetron sputtering system. A typical multilayer consists of a bilayer stack up to 50 periods, with alternating (50-100) nm thick magnetic layers and (2-20) nm thick dielectric interlayers. We introduced the in-plane magnetic anisotropy in these films during sputtering by a combination of a linear magnetic field, seed layer texturing by means of linear collimators, and the oblique incidence inherent to the geometry of the sputter system. Depending on the magnetic material, the anisotropy field for these films was tuned in the range of ∼(7-120) Oe by choosing the appropriate interlayer thickness, the aspect ratios of the linear collimators in front of the targets, and the sputter process parameters (e.g. pressure, power, DC pulse frequency), while the coercivity was kept low, ∼(0.05-0.9) Oe. The alignment of the easy axis (EA) on the 8" wafers was typically between ±1.5 • and ±4 • . We discuss the interdependence of structure and magnetic properties in these films, as revealed by atomic force microscopy (AFM), X-ray reflectivity (XRR) with reciprocal space mapping (RSM) and magneto-optical Kerr effect (MOKE) measurements. © 2017 Author (s)

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Section: Introductionmentioning

confidence: 99%

“…5 20 soft magnetic alloys with different interlayer materials, interlayer thickness, total film thickness, process parameters and angular distribution of the sputtered material. More specifically, we deposit these films on 8" bare Si wafers and Si/200nm-thermal-SiO 2 wafers in the high-throughput Evatec LLS-EVO-II sputter system.…”

Section: Introductionmentioning

confidence: 99%

Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications

Falub¹,

Rohrmann²,

Bless³

et al. 2017

AIP Advances

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“…Since Co 85 B 15 -Pd-O NGSM films have large electrical loss and magnetic loss near fr, they are expected, for example, to be useful as an excellent noise suppressor in the semi-micro wave frequency range. A micro strip line, MSL, of Zc = 50 Ω, whose ends were both connected to a network analyzer, was used to evaluate the noise suppression effect [14]. Fig.…”

Section: Their Applicationsmentioning

confidence: 99%

Properties and Structure of High Frequency Soft Magnetic Nano-composite Films

Ohnuma¹,

Masumoto²

2011

Journal of Magnetics

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Metal-insulator type, nano-granular soft magnetic films have been reviewed from the viewpoint of high frequency magnetic materials. The formation of nano-granular structure is related to the magnitude of heat of formation of intergranule materials. Variation of the ratio of granule phase to intergranule phase in the film is found to produce various characteristics in the magnetic properties of the film. The HRTEM observation reveals that neighboring granules in the film with above 60 at.% Co, contact at considerable points and the films show soft magnetic properties which are explainable in terms of the random anisotropy model for nanocrystalline materials. Addition of Ni group elements in Co-O based films enhances their anisotropy field up to 400 Oe and they exhibit excellent frequency response of permeability. Also, large electromagnetic noise suppression effect is demonstrated as one of their potential applications.

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“…Therefore, to change the exchange bias field H ex of each Fe-Si layer in the exchange-coupled multilayer film, each Fe-Si layer thickness t F must be changed, as in Eq. (1). So the exchange-coupled multilayer film with different exchange bias fields has plural FMR absorptions frequency 4 .…”

Section: Introductionmentioning

confidence: 99%

“…In this study, a Mn-Ir/Fe-Si exchange-coupled multilayer film has been proposed as a ferromagnetic resonance (FMR) absorption material for the wideband noise filter 1,2 . Since the exchange bias magnetic field H ex is introduced to the ferromagnetic Fe-Si layers by the effect of Mn-Ir/Fe-Si exchange coupling, the FMR frequency of the Fe-Si layer can be written using the following equation,…”

Section: Introductionmentioning

confidence: 99%

Mn – Ir ∕ Fe – Si exchange-coupled multilayer film with plural ferromagnetic resonance absorptions for wideband noise filter

Sonehara

Ishikawa

Sugiyama

et al. 2006

Journal of Applied Physics

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Mn-Ir/Fe-Si exchange-coupled multilayer films for a wideband and GHz band noise filter are fabricated and evaluated. The Fe-Si film has characteristics of high saturation magnetization of 19 kG, low magnetostriction of the order of 10 -6 and high resistivity of 73 µΩ･cm. When the exchange bias magnetic field is introduced to the Fe-Si layers by the effect of Mn-Ir/Fe-Si exchange-coupling, the ferromagnetic resonance (FMR) frequency of the multilayer film is higher than the natural frequency of the single Fe-Si film. In addition, the multilayer film which has different thickness in each Fe-Si layer has plural FMR frequencies. The multiple FMR frequency gives the films characteristic of wideband energy absorption. The FMR absorption bandwidth of the multilayer film which has three FMR frequencies is about three times wider than that of single FMR film. Therefore, the multilayer film with plural FMR frequencies has an advantage in wideband noise absorption and will be useful material for the wideband and GHz frequency range noise filterings.

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High-frequency noise suppression in downsized circuits using magnetic granular films

Cited by 94 publications

References 2 publications

Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications

Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications

Properties and Structure of High Frequency Soft Magnetic Nano-composite Films

Mn – Ir ∕ Fe – Si exchange-coupled multilayer film with plural ferromagnetic resonance absorptions for wideband noise filter

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