“…We have so far been extensively studying nano-granular, soft magnetic (named simply "NGSM", hereafter) films as high frequency materials useful at the GHz range. Such a film has been successfully synthesized by forming Co based, metal-insulator type, nano-granular magnetic thin films [4]. NGSM films were found to satisfy these properties with (Fe, Co, Ni)-(Al, Si, Zr, Mg, RE)-(oxide or nitride) and (Fe, Co)-(Al, Mg)-fluoride systems (RE: rare earth elements) [5].…”