High-field deformation of elastomeric dielectrics for actuators

Pelrine, Ron; Kornbluh, Roy; Joseph, Jose; Heydt, Richard; Pei, Qibing; Chiba, Seiki

doi:10.1016/s0928-4931(00)00128-4

Cited by 690 publications

(644 citation statements)

References 12 publications

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“…All regime I switches that were made exhibited this problem, heavily implanted electrodes became virtually impossible to handle as they would crack under the smallest strain. This cracking behavior is also exhibited by sputtered gold or silver electrodes and has been noted by others [33]. Figure 9 shows stretch resistance data for a medium dose (regime II) piezo-resistor implanted at 53 pulses/cm 2 .…”

Section: Methodssupporting

confidence: 78%

Ion implanted dielectric elastomer circuits

et al. 2012

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Starfish and octopuses control their infinite degreeof-freedom arms with panache-capabilities typical of nature where the distribution of reflex-like intelligence throughout soft muscular networks greatly outperforms anything hard, heavy, and man-made. Dielectric elastomer actuators show great promise for soft artificial muscle networks. One way to make them smart is with piezo-resistive Dielectric Elastomer Switches (DES) that can be combined with artificial muscles to create arbitrary digital logic circuits. Unfortunately there are currently no reliable materials or fabrication process. Thus devices typically fail within a few thousand cycles.As a first step in the search for better materials we present a preliminary exploration of piezo-resistors made with filtered cathodic vacuum arc metal ion implantation. DES were formed on polydimethylsiloxane silicone membranes out of ion implanted gold nano-clusters. We propose that there are four distinct regimes (high dose, above percolation, on percolation, low dose) in which gold ion implanted piezo-resistors can operate and present experimental results on implanted piezo-resistors switching high voltages as well as a simple artificial muscle inverter. While gold ion implanted DES are limited by high hysteresis and low sensitivity, they already show promise for a range of applications

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Section: Methodssupporting

confidence: 78%

Ion implanted dielectric elastomer circuits

et al. 2012

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“…At the aspect ratio of 2 and a gap of 2 µm, the pull-in is expected to happen at 92% strain and at a prohibitively high voltage of 983 V. The pull-in field is 491 V µm −1 , which is far greater than the field strength of most dielectric elastomers. For example, Nusil CF19-2186 silcone rubber has a field strength of 235 V µm −1 , Dow Corning Sylgard 186 silicone rubber has a field strength of 144 V µm −1 , and Dow Corning HS3 silicone rubber has a field strength of 72 V µm −1 [5]. It is concluded that the dielectric elastomers may fail first because of the electrical breakdown, rather than the electromechanical pull-in that occurs at a much higher electric field.…”

Section: Pull-in Analysismentioning

confidence: 99%

“…The electrostatic force exceeds the mechanical spring force, which maintains the equilibrium of the movable electrodes. Similarly, the elastomer films with soft electrodes also undergo an electromechanical instability at a very high electric field and locally contract rapidly in the thickness direction until breakdown occurs [5]. It is therefore interesting to investigate whether the pull-in instability occurs in an elastomer-filled capacitor with rigid electrodes.…”

Section: Nonlinear Theorymentioning

confidence: 99%

“…They consist of silicon electrodes, a filling of PDMS (poly-dimethyl-siloxane, also termed silicone rubber) and surrounding of air. Physical properties of these materials are listed in table 1 [5,12]. Their geometrical dimensions are listed in table 2.…”

Section: Validation By Finite Element Analysismentioning

confidence: 99%

“…But, they are softer and cannot be patterned as tall structures on their own. For example, a silicone rubber has a dielectric constant of 2.6 and Young's modulus of 1 MPa; and polyurethane elastomer has a dielectric constant of 7.0 and Young's modulus of 17 MPa [5]. Miniaturization of multilayer stacked designs is possible, but this is time consuming to deposit layer by layer ( figure 1(A)).…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Actuated elastomers with rigid vertical electrodes

Lau

Goosen

Keulen

et al. 2006

J. Micromech. Microeng.

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This paper presents a novel design of actuated elastomers using rigid, vertical standing electrodes. The electrodes of high rigidity are designed to have small width, small gaps and large depth in order to produce large electrostatic forces at a moderate voltage, as well as to reduce the constraining effect on the soft elastomers. This novel design embodies lateral stacking to accumulate small strain into an adequate displacement for micro-actuation. Analytical and numerical analyses are performed to evaluate the force-displacement characteristics of the elastomer actuators. It is shown that actuation of the novel design is not limited by the electrostatic pull-in instability, and it is capable of travelling a large range at a high electric field. In addition, feasibility of fabrication processes is studied. It is shown that lateral stacking can readily be realized by filling liquid elastomers into deep, narrow and vertical trenches. A theoretical benchmark comparison with a conventional air-gap electrostatic comb drive indicates that the new elastomer actuator promises great flexibility, large attraction force and robustness against shock and dust blockage.

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High-Strain Actuator Materials Based on Dielectric Elastomers

2000

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Dielectric elastomers are a new class of actuator materials that exhibit excellent performance. The principle of operation, as well as methods to fabricate and test these elastomers, is summarized here. The Figure is a sketch of an elastomer film (light gray) stretched on a frame (black) and patterned with an electrode (mid‐gray). Upon applying a voltage, the active portion of the elastomer expands and the strain can easily be measured optically.

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High-field deformation of elastomeric dielectrics for actuators

Cited by 690 publications

References 12 publications

Ion implanted dielectric elastomer circuits

Ion implanted dielectric elastomer circuits

Actuated elastomers with rigid vertical electrodes

High-Strain Actuator Materials Based on Dielectric Elastomers

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