2014 IEEE 40th Photovoltaic Specialist Conference (PVSC) 2014
DOI: 10.1109/pvsc.2014.6925557
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High efficiency solar cells on direct kerfless 156 mm mono crystalline Si wafers by high throughput epitaxial growth

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Cited by 12 publications
(10 citation statements)
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“…Additionally, the strong signature of a recombination-active bulk defect is not observable at low injection levels. In other work, effective lifetimes > 2 ms have been measured for n-type epi silicon with a resistivity of 2 Ωcm [20].…”
Section: Resultsmentioning
confidence: 88%
“…Additionally, the strong signature of a recombination-active bulk defect is not observable at low injection levels. In other work, effective lifetimes > 2 ms have been measured for n-type epi silicon with a resistivity of 2 Ωcm [20].…”
Section: Resultsmentioning
confidence: 88%
“…The porosity and thickness of PSI layers were optimized to grow a high‐quality epi‐Si wafer and minimize substrate consumption, while maximizing the yield of the epi wafer separation from the substrate. The epi‐Si was grown in a high‐throughput reactor at >5 µm/min growth rate to minimize the cost while maintaining the wafer quality . The reactor was designed to exploit the non‐linear depletion of trichlorosilane across the surface of the substrate at ~1150 °C under nearly atmospheric pressure.…”
Section: Device Fabricationmentioning
confidence: 99%
“…Kerfless c‐Si technology is considered promising because it avoids ingot crystallization and wire sawing , and can be cost effective. Our strategy of fabricating HJ solar cells on epitaxially grown silicon (epi‐Si) wafers produced by Direct Gas to Wafer TM technology is based on three factors as follows : (i) Thinner wafers produced by kerfless technology reduce the raw material cost considerably; (ii) The thermal donor killer annealing processing is not necessary because the oxygen concentration of <3 × 10 17 cm −3 in epi‐Si wafers is lower than that of 1 × 10 18 cm −3 in Cz‐Si wafers, reducing the production cost; and (iii) The wafer resistivity can be made consistent between wafers by doping during chemical vapor deposition, improving repeatability in manufacturing. In 1994, Yonehara et al .…”
Section: Introductionmentioning
confidence: 99%
“…In this study, we first modeled the p‐type PERT cell with different full area BSF profiles to establish that an epi‐grown uniform and lightly doped thick BSF (15–30 µm, 10 17 ~10 18 cm −3 ) can produce higher cell performance compared with the counterpart PERCs. Following the model guidelines, 180–200 µm large area (239 cm 2 ) pp + wafers or structures were grown at Crystal Solar Inc. by epitaxy on a chemically formed porous Si layer on a reusable substrate. Epitaxial growth involved chemical vapor deposition (CVD) using chlorosilane gases.…”
Section: Introductionmentioning
confidence: 99%