2017
DOI: 10.1088/1674-1056/26/1/017803
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High-efficiency InGaN/AlInGaN multiple quantum wells with lattice-matched AlInGaN superlattices barrier

Abstract: A new approach to fabricating high-quality AlInGaN film as a lattice-matched barrier layer in multiple quantum wells (MQWs) is presented. The high-quality AlInGaN film is realized by growing the AlGaN/InGaN short period superlattices through metalorganic chemical vapor deposition, and then being used as a barrier in the MQWs. The crystalline quality of the MQWs with the lattice-matched AlInGaN barrier and that of the conventional InGaN/GaN MQWs are characterized by x-ray diffraction and scanning electron micro… Show more

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Cited by 5 publications
(2 citation statements)
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“…The other results are first reported through this study. The effect of Aluminum and Indium addition on the lattices of β-Ga 2 O 3 alloys are primarily attributed to the atomic size difference in the material, which is also consistent with observations shown in III-Nitride-based quaternary materials [7,[35][36][37][38]. Specifically, aluminum atom is smaller than Gallium atom while Indium atom is larger than Gallium atom.…”
Section: Resultssupporting
confidence: 84%
See 1 more Smart Citation
“…The other results are first reported through this study. The effect of Aluminum and Indium addition on the lattices of β-Ga 2 O 3 alloys are primarily attributed to the atomic size difference in the material, which is also consistent with observations shown in III-Nitride-based quaternary materials [7,[35][36][37][38]. Specifically, aluminum atom is smaller than Gallium atom while Indium atom is larger than Gallium atom.…”
Section: Resultssupporting
confidence: 84%
“…β-(Al x In y Ga 1−x−y ) 2 O 3 alloys) is non-existent in literature by far. It is important to point out that quaternary alloy layer has been implanted in well-established III-Nitride and III-V materials class to achieve desirable device performance [4,6,[31][32][33][34][35][36][37][38][39][40][41][42][43]. Quaternary alloys typically allow large tuning range of structural, electronic and optical properties that are different from the host material.…”
Section: Introductionmentioning
confidence: 99%