2015
DOI: 10.1016/j.solmat.2015.07.014
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High efficiency high rate microcrystalline silicon thin-film solar cells deposited at plasma excitation frequencies larger than 100 MHz

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Cited by 15 publications
(6 citation statements)
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“…14 Using plasma excitation frequencies larger than 100 MHz is a unique feature in the field of PECVD methods. 15 Beneficial effects of using 140 MHz PECVD compared to lower frequencies were already demonstrated by Leszczynska et al for thin-film silicon solar cells. 16 Here, we…”
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confidence: 86%
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“…14 Using plasma excitation frequencies larger than 100 MHz is a unique feature in the field of PECVD methods. 15 Beneficial effects of using 140 MHz PECVD compared to lower frequencies were already demonstrated by Leszczynska et al for thin-film silicon solar cells. 16 Here, we…”
mentioning
confidence: 86%
“…14 Using plasma excitation frequencies larger than 100 MHz is a unique feature in the field of PECVD methods. 15 Beneficial effects of using 140 MHz PECVD compared to lower frequencies were already demonstrated by Leszczynska et al for thin-film silicon solar cells. 16 Here, we show that in contrast to the conventional radio frequency (RF, 13.56 MHz) PECVD a very high frequency (VHF, 140 MHz) PECVD can be used to cover CVD graphene with thin a-Si:H layers very softly without changing the properties of the underlying graphene significantly.…”
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confidence: 86%
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“…In the following, 160 nm thick n-type a-Si:H was locally deposited on top of the structure by VHF-PECVD (140 MHz). A deterioration of the graphene layer quality due to the silicon deposition can be excluded according to previous investigations .…”
Section: Resultsmentioning
confidence: 99%
“…The visibility in the EQE spectrum is even more reduced due to poor carrier collection from these defects. It is well known that, although “cracks” in μc-Si might be effectively invisible in the EQE, they still reduce the V OC considerably. The proportionality between radiative recombination and optical absorption is lost in such cases.…”
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confidence: 99%