High-efficiency and low-absorption Fresnel compound zone plates for hard X-ray focusing

Kuyumchyan, A.; Isoyan, Artak; Shulakov, E. V.; Aristov, V. V.; Kondratenkov, M.; Snigirev, A.; Souvorov, Alexei; Tamasaku, Kenji; Yabashi, Makina; Ishikawa, Tetsuya; Trouni, K. G.

doi:10.1117/12.450480

Cited by 13 publications

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“…Regularization as a technology for solving incorrectly presented problems [42], which took its development in the 60s of the last century in the method of computed tomography, in no time found its application in the implementation of the algebraic approach for reconstruction [20]. Today, when the achieved nanometer resolution [43] worsened SNR, regularization methods are again in demand [44,45]. The use of mathematical models in computational experiments describing the relationship between the magnitude of the recorded signal, the spatial distribution of the attenuation coefficient, and the description of the optical path made it possible to specify the form of the regularizing term and obtain a stable solution to the reconstruction problem in a number of cases.…”

Section: Algebraic Approach For Reconstruction Allowing To Work In Po...mentioning

confidence: 99%

X-ray tomography: the way from layer-by-layer radiography to computed tomography

2021

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The methods of X-ray computed tomography allow us to study the internal morphological structure of objects in a non-destructive way. The evolution of these methods is similar in many respects to the evolution of photography, where complex optics were replaced by mobile phone cameras, and the computers built into the phone took over the functions of high-quality image generation. X-ray tomography originated as a method of hardware non-invasive imaging of a certain internal cross-section of the human body. Today, thanks to the advanced reconstruction algorithms, a method makes it possible to reconstruct a digital 3D image of an object with a submicron resolution. In this article, we will analyze the tasks that the software part of the tomographic complex has to solve in addition to managing the process of data collection. The issues that are still considered open are also discussed. The relationship between the spatial resolution of the method, sensitivity and the radiation load is reviewed. An innovative approach to the organization of tomographic imaging, called “reconstruction with monitoring”, is described. This approach makes it possible to reduce the radiation load on the object by at least 2–3 times. In this work, we show that when X-ray computed tomography moves towards increasing the spatial resolution and reducing the radiation load, the software part of the method becomes increasingly important.

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Section: Algebraic Approach For Reconstruction Allowing To Work In Po...mentioning

confidence: 99%

X-ray tomography: the way from layer-by-layer radiography to computed tomography

2021

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“…Interestingly, while the intensity of light coming into even diffraction orders for standard rectangular FZPs is zero, it substantially increases if the FZP profile deviates from the standard shape or placement. As the resolution increases with the diffraction order (Equation (1)), this effect can be used to perform microscopy at higher resolutions [37][38]. Previous studies have shown for instance that by changing the line to space ratio of the zones from the standard value 1:1 to 1:3, the efficiency of the 2 nd order increases from zero up to a fourth of the 1 st order efficiency [38][39].…”

Section: Fabrication and Designmentioning

confidence: 99%

Ion beam lithography for Fresnel zone plates in X-ray microscopy

Keskinbora¹,

Grévent²,

Bechtel³

et al. 2013

Opt. Express

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Fresnel Zone Plates (FZP) are to date very successful focusing optics for X-rays. Established methods of fabrication are rather complex and based on electron beam lithography (EBL). Here, we show that ion beam lithography (IBL) may advantageously simplify their preparation. A FZP operable from the extreme UV to the limit of the hard X-ray was prepared and tested from 450 eV to 1500 eV. The trapezoidal profile of the FZP favorably activates its 2 nd order focus. The FZP with an outermost zone width of 100 nm allows the visualization of features down to 61, 31 and 21 nm in the 1 st , 2 nd and 3 rd order focus respectively. Measured efficiencies in the 1 st and 2 nd order of diffraction reach the theoretical predictions. References and links1. D. T. Attwood, Soft X-rays and extreme ultraviolet radiation (Cambridge University Press, 1999). 2. A. Sakdinawat and D. Attwood, "Nanoscale X-ray imaging," Nature Photonics 4, 840-848 (2010). 3. R. Falcone, C. Jacobsen, J. Kirz, S. Marchesini, D. Shapiro, and J. Spence, "New directions in X-ray microscopy," Contemp. Phys. 52, 293-318 (2011). 4. B. Kaulich, P. Thibault, A. Gianoncelli, and M. Kiskinova, "Transmission and emission x-ray microscopy: operation modes, contrast mechanisms and applications," J. (12) in this article (equation (13) and (14)

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“…Fresnel x-ray zone plates (FXZP) are x-ray optical elements, which are widely used for x-ray imaging and sharp focusing of x-rays in the wavelength range from soft ͑ ϭ 46.9 nm͒ [1,2] to hard ͑energy Ͼ 10 keV͒ [3] radiation. These optical elements have been extensively studied for the past 25 years, but still remain rather expensive and difficult to manufacture.…”

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confidence: 99%

Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition

et al. 2007

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A new cost-efficient sputter-slice technology for hard x-ray (10-30 keV) Fresnel zone plates fabrication, imposing no limitation to aspect ratio, is proposed. By means of a plasma chemical process, SiO(2)/Si(1-x)Ge(x)O(2) glassy film multilayer structures are deposited on a lateral surface of a silica rod, outermost layers being as thin as 100 nm. It has been shown by numerical simulation that for x=0.2 germanium fraction, 100-300 microm zone plate thickness and the number of zones of about 1000, first order diffraction efficiency as high as 20%-30% at the energy of approximately 20 keV can be achieved.

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High-efficiency and low-absorption Fresnel compound zone plates for hard X-ray focusing

Cited by 13 publications

References 0 publications

X-ray tomography: the way from layer-by-layer radiography to computed tomography

X-ray tomography: the way from layer-by-layer radiography to computed tomography

Ion beam lithography for Fresnel zone plates in X-ray microscopy

Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition

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