2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022
DOI: 10.1109/mems51670.2022.9699653
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High Driving Frequency (>54 kHz) and Wide Scanning Angle (>100 Degrees) MEMS Mirror Applying Secondary Resonance For 2K Resolution AR/MR Glasses

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Cited by 9 publications
(6 citation statements)
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“…Nevertheless, the majority of currently available SLMs exhibit sluggish performance, leading to significant latency [ 27 , 28 ], and the low refresh rate of SLMs significantly affects the throughput of BONN. Despite advances in MEMS technology, most SLMs still operate within a range of tens of kilohertz, significantly slower than electronic switches, which introduces substantial latency in BONN operations.…”
Section: Resultsmentioning
confidence: 99%
“…Nevertheless, the majority of currently available SLMs exhibit sluggish performance, leading to significant latency [ 27 , 28 ], and the low refresh rate of SLMs significantly affects the throughput of BONN. Despite advances in MEMS technology, most SLMs still operate within a range of tens of kilohertz, significantly slower than electronic switches, which introduces substantial latency in BONN operations.…”
Section: Resultsmentioning
confidence: 99%
“…While we used an LCD as an example of an SLM in the proposed SOCNN, it is important to note that other types of SLMs can also be employed. However, SLMs based on micro-mirror or MEMS technology have certain drawbacks in system design [10][11][12][13][14]. They require input and output optical paths to be on the same side, which necessitates either sharing the optical path or using oblique light paths on the micro-mirror device.…”
Section: Methodsmentioning
confidence: 99%
“…In a Fourier-transform-based system, a laser and a spatial light modulator (SLM) are required to generate a coherent input. However, most of the currently available SLMs are slow and serially addressable, resulting in considerable latency [10][11][12][13][14]. This latency diminishes the advantages of massive parallelism in the optical neural network.…”
Section: Introductionmentioning
confidence: 99%
“…Numerous studies have presented resonant 1D scanning micromirrors exhibiting large optical scan angles, sometimes higher than 100 • [1,2]. The in-depth characterization presented in this study, including frequency response measurements at different pressure levels and a quantification of dynamic deformation, enables a substantially more profound analysis and understanding of the microelectromechanical structures investigated.…”
Section: Introductionmentioning
confidence: 95%