High-Density and Low-Crosstalk Multilayer Silicon Nitride Waveguide Superlattices With Air Gaps

Li, Wen-ling; Liu, Jingwei; Cheng, Guo An; Zheng, Ruiting; Wu, Xiaoling

doi:10.1109/jphot.2022.3232094

IEEE Photonics J.

2023

DOI: 10.1109/jphot.2022.3232094

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High-Density and Low-Crosstalk Multilayer Silicon Nitride Waveguide Superlattices With Air Gaps

Wen-ling Li

Jingwei Liu²,

Guo An Cheng

et al.

Abstract: High-density and low-crosstalk multilayer silicon nitride High-density and low-crosstalk multilayer silicon nitride waveguide superlattices with air gaps waveguide superlattices with air gaps This paper was downloaded from TechRxiv (https://www.techrxiv.org). LICENSE CC BY 4.0

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High-Density and Low-Crosstalk Multilayer Silicon Nitride Waveguide Superlattices With Air Gaps

Abstract: High-density and low-crosstalk multilayer silicon nitride High-density and low-crosstalk multilayer silicon nitride waveguide superlattices with air gaps waveguide superlattices with air gaps This paper was downloaded from TechRxiv (https://www.techrxiv.org). LICENSE CC BY 4.0

Cited by 0 publications

References 38 publications

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