1998
DOI: 10.1063/1.120734
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High carrier mobility in polycrystalline thin film diamond

Abstract: Polycrystalline diamond films have been found to display p-type surface conductivity. No bulk impurity is added to the films; the p-type characteristics of the undoped diamond are thought to be due to a surface or near surface hydrogenated layer. Carrier concentrations within the range 1017–1019 cm−3 have been measured; control over the carrier concentration can be achieved by annealing the “as-grown” films in air. For a given annealing temperature a stable carrier concentration arises. The Hall carrier mobili… Show more

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Cited by 113 publications
(52 citation statements)
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“…The mechanism by which mobility is reduced is not well understood at present, though is often correlated with higher carrier concentration, possibly due to increased coulomb scattering at the interface. 30 Similar reduction in mobility was also observed after increased carrier concentration induced by MoO 3 . 18,19 To verify the high resistivity of standalone V 2 O 5 films, 100 nm of V 2 O 5 was deposited simultaneously onto an insulating SiN substrate and electrically characterised.…”
Section: à2supporting
confidence: 64%
“…The mechanism by which mobility is reduced is not well understood at present, though is often correlated with higher carrier concentration, possibly due to increased coulomb scattering at the interface. 30 Similar reduction in mobility was also observed after increased carrier concentration induced by MoO 3 . 18,19 To verify the high resistivity of standalone V 2 O 5 films, 100 nm of V 2 O 5 was deposited simultaneously onto an insulating SiN substrate and electrically characterised.…”
Section: à2supporting
confidence: 64%
“…The films were around 100 mm in thickness and exhibited a random crystal morphology with typical grain sizes within the range 20 to 40 mm. Raman spectroscopy carried out using a red He±Ne excitation source showed only the sharp characteristic peak of diamond at 1332 cm ±1 with little background and no evidence of any other structure; further details have been given elsewhere [11]. Prior to the formation of contacts, the diamond was subjected to an acid treatment to remove contamination and residual sp 2 on the surface.…”
Section: Methodsmentioning
confidence: 99%
“…Hydrogenation of the diamond surface termination state of diamond can result in a conducting diamond surface [10]. Free carrier absorption is another possible mechanism, with promotion of carrier into this conducting band at elevated temperatures.…”
Section: Optical Properties At Elevated Temperaturesmentioning
confidence: 99%