High-Capacity, Self-Assembled Metal–Oxide–Semiconductor Decoupling Capacitors

Black, Charles T.; Guarini, K.W.; Zhang, Ying; Benedict, J.; Sikorski, E.; Babich, I.; Milkove, K. R.

doi:10.1109/led.2004.834637

Cited by 94 publications

(51 citation statements)

References 11 publications

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“…[104] Additionally, block copolymers have been pursued as templates for pattern transfer in photolithography. [105] Finally, they are of great interest in healthcare materials and in realization of protein adsorption optimized surfaces where the chemistry and periodicity of the self-assembled structure can be tuned to guide protein surface packing and conformation. It is important to note that block copolymer films can be realized on flexible polymer substrates, such as PTFE, [106] PET (Figure 4b), [107] and other low-surface-energy materials, [108] which is advantageous in terms of surface modification of implant materials.…”

Section: Block Copolymersmentioning

confidence: 99%

Controlling Protein Adsorption through Nanostructured Polymeric Surfaces

Firkowska‐Boden

Zhang

Jandt

2017

Adv Healthcare Materials

105

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The initial host response to healthcare materials' surfaces after implantation is the adsorption of proteins from blood and interstitial fluids. This adsorbed protein layer modulates the biological/cellular responses to healthcare materials. This stresses the significance of the surface protein assembly for the biocompatibility and functionality of biomaterials and necessitates a profound fundamental understanding of the capability to control protein–surface interactions. This review, therefore, addresses this by systematically analyzing and discussing strategies to control protein adsorption on polymeric healthcare materials through the introduction of specific surface nanostructures. Relevant proteins, healthcare materials' surface properties, clinical applications of polymer healthcare materials, fabrication methods for nanostructured polymer surfaces, amorphous, semicrystalline and block copolymers are considered with a special emphasis on the topographical control of protein adsorption. The review shows that nanostructured polymer surfaces are powerful tools to control the amount, orientation, and order of adsorbed protein layers. It also shows that the understanding of the biological responses to such ordered protein adsorption is still in its infancy, yet it has immense potential for future healthcare materials. The review, which is—as far as it is known—the first one discussing protein adsorption on nanostructured polymer surfaces, concludes with highlighting important current research questions.

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Section: Block Copolymersmentioning

confidence: 99%

Controlling Protein Adsorption through Nanostructured Polymeric Surfaces

Firkowska‐Boden

Zhang

Jandt

2017

Adv Healthcare Materials

105

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“…Li et al have shown that PS-b-PMMA can be directed into linear arrays of parallel PMMA cylinders or hexagonal packed vertically cylinders by subtle film thickness changes using nano-imprinting on a random copolymer brush [94] Graphoepitaxy is undoubtedly a valuable and effective resolution enhancement technique for creating sub 10 nm nanoscale devices. Although graphoepitaxy is a viable approach to realising nanoscale devices, certain challenges must be overcome for the technique to be accepted for future 'complimentary' lithographic technologies, such as channel width and confinement [26,99,110,112,122], mesa to trench dimension [98,122], effect of trench wall and base chemistry [112][113]123] and importantly inhibit defect formation within both the top-down template pattern and bottom-up polymer self-assembled nanopattern [114].…”

Section: Graphoepitaxymentioning

confidence: 99%

“…Shallow-trench array capacitor (decaps) were fabricated using a 40 nm pitch hexagonal array of PMMA cylinders in a PS matrix oriented perpendicular to the substrate [123]. The template was first transferred into a silicon dioxide hard mask.…”

Section: Nano-pillars and Anti-dot Arraysmentioning

confidence: 99%

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Farrell

Petkov²,

Morris

et al. 2010

Journal of Colloid and Interface Science

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Self-assembled nanoscale porous architectures, such as mesoporous silica films (MPS), block copolymer films (BCP) and porous anodic aluminas (PAAs), are ideal hosts for templating one dimension (1 D) nano-entities for a wide range of electronic, photonic, magnetic and environmental applications. All three templates offer dimensional scalability and tunability over a wide range, with critical pore sizes for each system well below the 20 nm threshold [1][2][3]. Recently, research has progressed towards controlling the pore direction, orientation and long range order of these nanostructures through so called directed self-assembly (DSA). Significantly, the introduction of a wide range of top-down chemically and physically pre-patterning substrates has facilitated the DSA of nanostructures into functional device arrays. The following review begins with an overview of the fundamental aspects of self-assembly and ordering processes during the formation of PAAs, BCPs and MPS films. Special attention is given to the different ways of directing self-assembly, concentrating on properties such as uni-directional alignment, precision placement and registry of the self-assembled structures to hierarchal or top down architectures. Finally, to distinguish this review from other articles we focus on research where nanostructures have been utilised in part to fabricate arrays of functioning devices below the sub 50 nm threshold, by subtractive transfer and additive methods. Where possible, we attempt to compare and contrast the different templating approaches and highlight the strengths and/or limitations that will be important for their potential integration into downstream processes. ACCEPTED MANUSCRIPT 3 SECTION 1.0: SELF ASSEMBLY AND NANO-ARCHITETCURESThe diversity of self-assembled nanostructures and more importantly, their precise orientation within a thin film (fixed to a substrate) ultimately determines their function and overall application. A large population of research reports to date have focused on identifying these orientations and related periodicities, using x-ray and microscopy tools, as well the development of methods for readily manipulating nanostructures, such as pre-patterning of silicon substrates for the alignment of block copolymers (BCPs) [4] and mesoporous thin films (MTFs) [5] and altering the growth direction of porous anodic alumina (PAA) templates [6]. In this section, a brief synopsis of the mechanisms behind the self-assembly/organisation of each system and highlight nanoscale architectures (and orientations), which are important from a device perspective. Templated mesoporous thin filmsOrdered mesoporous powders were first discovered by researchers at the Mobil Petrochemical Corporation in 1992 and shortly after, sol-gel derived mesoporous silica films were fabricated [1,7].The first series of ordered mesoporous films were reported by Yang et al. in 1996 [8], prepared using initial surfactant concentrations above their critical micelle concentration (CMC). However the films prepared fil...

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“…First real-world applications of such nanoscale patterning are beginning to be reported; for example, for use in flash memory devices and metal oxide semiconductor (MOS) capacitors. [8][9][10][11] For many potential applications the dimensions of the nanostructures need to be optimized experimentally. Tools to continuously vary the dimensions of the nanopatterns in a predictable and simple manner are required.…”

Section: Introductionmentioning

confidence: 99%

Tuning the Dimensions and Periodicities of Nanostructures Starting from the Same Polystyrene‐block‐poly(2‐vinylpyridine) Diblock Copolymer

Krishnamoorthy

Pugin

Brugger

et al. 2006

Adv Funct Materials

102

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The controlled tuning of the characteristic dimensions of two‐dimensional arrays of block‐copolymer reverse micelles deposited on silicon surfaces is demonstrated. The polymer used is polystyrene‐block‐poly(2‐vinylpyridine) (91 500‐b‐105 000 g mol–1). Reverse micelles of this polymer with different aggregation numbers have been obtained from different solvents. The periodicity of the micellar array can be systematically varied by changing copolymer concentration, spin‐coating speeds, and by using solvent mixtures. The profound influence of humidity on the micellar film structure and the tuning of the film topography through control of humidity are presented. Light scattering, atomic force microscopy, scanning electron microscopy, transmission electron microscopy, and X‐ray photoelectron spectroscopy were used for characterization. As possible applications, replication of micellar array topography with polydimethylsiloxane and post‐loading of the micelles to form iron oxide nanoparticle arrays are presented.

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High-Capacity, Self-Assembled Metal–Oxide–Semiconductor Decoupling Capacitors

Cited by 94 publications

References 11 publications

Controlling Protein Adsorption through Nanostructured Polymeric Surfaces

Controlling Protein Adsorption through Nanostructured Polymeric Surfaces

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Tuning the Dimensions and Periodicities of Nanostructures Starting from the Same Polystyrene‐block‐poly(2‐vinylpyridine) Diblock Copolymer

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