2015
DOI: 10.1063/1.4936891
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High breakdown single-crystal GaN p-n diodes by molecular beam epitaxy

Abstract: Molecular beam epitaxy grown GaN p-n vertical diodes are demonstrated on single-crystal GaN substrates. A low leakage current <3 nA/cm 2 is obtained with reverse bias voltage up to À20 V. With a 400 nm thick n-drift region, an on-resistance of 0.23 mX cm 2 is achieved, with a breakdown voltage corresponding to a peak electric field of $3.1 MV/cm in GaN. Single-crystal GaN substrates with very low dislocation densities enable the low leakage current and the high breakdown field in the diodes, showing significan… Show more

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Cited by 56 publications
(45 citation statements)
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“…It is necessary to fabricate the devices on each plane to compare these material properties. There are several studies about power devices fabricated on the c‐plane ; however, there are only few studies about m‐plane power devices . Furthermore, considering the design of practical devices, device fabrication with an epitaxial drift layer is required.…”
Section: Introductionmentioning
confidence: 99%
“…It is necessary to fabricate the devices on each plane to compare these material properties. There are several studies about power devices fabricated on the c‐plane ; however, there are only few studies about m‐plane power devices . Furthermore, considering the design of practical devices, device fabrication with an epitaxial drift layer is required.…”
Section: Introductionmentioning
confidence: 99%
“…Published by AIP Publishing. https://doi.org/10.1063/1.5028530 III-nitride (III-N) materials have seen huge success in both electronics [1][2][3][4][5][6] and optoelectronics, [7][8][9][10][11][12][13][14][15][16] including power diodes, [1][2][3][4][5][6] solid-state lighting, [7][8][9][10][11][12] and integrated photonics. [13][14][15][16] Ternary InGaN alloys, in particular, have emerged in recent years as promising candidates for photovoltaic (PV) applications, [17][18][19][20][21][22] especially for high temperature PV applications, terrestrial photovoltaic thermal (PVT) hybrid solar collector systems, space applications, and top cells in multi-junction (MJ) solar cells.…”
mentioning
confidence: 99%
“…Wurtzite III-nitride semiconductors have been extensively investigated in optoelectronics [1][2][3][4][5][6][7][8][9][10][11] and high electron mobility transistors (HEMTs). 12,13 Recently, GaN based power diodes such as p-n diodes [14][15][16][17] and Schottky diodes 18 have gained considerable attention for power switching applications due to their high frequency capability and large critical electrical field. However, conventional GaN power diodes were heteroepitaxially grown on foreign substrates such as sapphire, [19][20][21][22] which led to large dislocation densities (>10 9 cm À2 ) in the materials.…”
mentioning
confidence: 99%
“…Furthermore, Ohta et al 15 proposed a multidrift-layer (MDL) design for GaN PN diodes, which increased the V BD of the device to 4.7 kV. Despite these encouraging results, GaN PN diodes typically have a very large turn-on voltage (V ON ) of >3 V, 16 which leads to large power loss for power switching applications. The two main loss mechanisms in a power switch are conduction loss (P C ) and switching loss (P S ).…”
mentioning
confidence: 99%