High Average Power Pulsed CO2 Laser for Short Wavelength Light Sources

Endo, Akira

doi:10.5772/38716

Cited by 2 publications

(3 citation statements)

References 21 publications

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“…The recent needs of LPP EUV light sources accelerated MOPA CO 2 laser technology toward kilowatt-level average power. According to the literature [10][11][12], axial-flow RF (radio frequency)excited CO 2 lasers were used as the amplifier, and output power of 7-8 kW with a repetition rate in excess of tens of kilohertz was demonstrated.…”

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confidence: 99%

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Transverse-flow radio-frequency-excited amplifier seeded by a cavity-dumped CO_2 laser for an extreme ultraviolet light source

et al. 2013

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A transverse-flow radio-frequency-exited CO2 laser amplifier was evaluated by a short-pulse seed laser. We constructed a prototype transverse-flow amplifier for the extreme UV laser-produced-plasma source. The electrical power for the discharge was enhanced to 100 kW at a 100% duty cycle. A Q-switched cavity-dumped CO2 seed laser emitting 13 ns pulses with a repetition rate of 100 kHz was amplified along a fivefold optical path in the amplifier gain medium. As a result, the amplifier output an average power of 3.07 kW with an 8.5 W laser input. The electrical-to-optical efficiency was 3.1%, which was far higher than that of axial-flow amplifiers at the same laser input power. The pulse showed a slight stretch from an input duration of 13 ns to an output of 15 ns.

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confidence: 99%

“…The small signal gain of our prototype amplifier was 0.9 m −1 . In the case of a commercial 15 kW axial-flow amplifier, the small signal gain was estimated at 0.43 m −1 [12]. Compared to axial-flow amplifiers, transverse-flow amplifiers have the potential to offer higher efficiency when used with low input power.…”

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confidence: 99%

Transverse-flow radio-frequency-excited amplifier seeded by a cavity-dumped CO_2 laser for an extreme ultraviolet light source

et al. 2013

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“…The fundamental physical properties of the pulsed short pulse amplification in RF pumped CO 2 laser are described by the author [10], and recently reviewed by K.Nowak on the evolution of this particular technology [11]. The limitation of the available maximum average power is dominated by the characteristics of the final amplifier geometry.…”

Section: Upgrade Of the Co 2 Laser Drivermentioning

confidence: 99%

Extendibility Evaluation of Industrial EUV Source Technologies for kW Average Power and 6.x nm Wavelength Operation

Endo¹

2014

JMP

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Interests in the extendibility are growing after the introduction of the LPP (Laser Produced Plasma) EUV source technology in the semiconductor industry, towards higher average power and shorter wavelength, based on the basic architecture of the established LPP EUV source technology. It is discussed in this article that the power scaling of the 13.5nm wavelength source is essentially possible by a slight increase of the driving laser power, CE (Conversion Efficiency) and EUV collection efficiency by some introduction of novel component technologies. Extension of the EUV wavelength towards BEUV (Beyond EUV), namely 6.x nm is discussed based on the general rule of the UTA (Unresolved Transition Arrays) of high Z ions, and development of multilayer mirrors in this particular wavelength region. Technical difficulties are evaluated for the extension of the LPP source technology by considering the narrower mirror bandwidth and higher melting temperature of the candidate plasma materials. Alternative approach based on the superconducting FEL is evaluated in comparison with the LPP source technology for the future solution.

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High Average Power Pulsed CO2 Laser for Short Wavelength Light Sources

Cited by 2 publications

References 21 publications

Transverse-flow radio-frequency-excited amplifier seeded by a cavity-dumped CO_2 laser for an extreme ultraviolet light source

Transverse-flow radio-frequency-excited amplifier seeded by a cavity-dumped CO_2 laser for an extreme ultraviolet light source

Extendibility Evaluation of Industrial EUV Source Technologies for kW Average Power and 6.x nm Wavelength Operation

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