High aspect ratio micromolds for the electroplating of micro electro discharge machining tools

Abstract

A new approach using micro systems technology for the fabrication of micro electro discharge machining tool electrodes using a combination of positive and negative photoresist fabricated with near UV-lithography as high aspect ratio micromolds was developed. Micromolds with heights varying from 200 to 650 lm and an aspect ratio of up to 26:1 were fabricated using SU-8 TM , a negative photoresist, as a micromold for the electrodeposition of the micro tool electrodes. Besides serving as a micromold, SU-8 TM is also used as an insulator to protect the sidewalls of the tool electrodes from corrosions. The fabrication of the SU-8 TM micromold was optimized to avoid cracks and delaminations. In the experiments, electrodes made of Cu, WCu, and CoFe were deposited into these High Aspect Ratio Micro Structure Technology (HARMST) micromolds. Furthermore, the process technique for electroplating in deep micromolds is discussed in this paper.