High aspect ratio, Large area silicon-based gratings for X-ray phase contrast imaging

Baborowski, J.; Revol, Vincent; Kottler, Christian; Kaufmann, R.; Niedermann, Philippe; Cardot, F.; Dommann, Alex; Neels, Antonia; Despont, M.

doi:10.1109/memsys.2014.6765684

Cited by 6 publications

(2 citation statements)

References 10 publications

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“…The phase grating G1, on the other hand, should absorb as little of the X-ray beam as possible, but lead to a phase shift of π or π/2 at the design energy. G1 is typically produced by etching the structures into a silicon substrate Baborowski et al, 2014] or through X-ray lithography and electroplating (LIGA) [Noda et al, 2007;Koch, 2017].…”

Section: Phase-stepping Scan and Signal Extractionmentioning

confidence: 99%

X-ray Phase-Contrast Imaging Using Near-Field Speckles

Zdora¹

2021

Springer Theses

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In the last decades, X-ray phase-contrast imaging has proven to be a powerful method for unveiling the inner structure of samples and is capable of visualising even minute density differences. Recently, speckle-based imaging (SBI), the youngest X-ray phase-sensitive technique, has received great interest due to its high sensitivity, quantitative character and relaxed requirements on the setup components and beam properties. This thesis is focussed on the development, experimental optimisation and applications of SBI, with the aim of simplifying its implementation, increasing its flexibility and expanding its potential.For this, a robust, flexible data acquisition and reconstruction approach, the unified modulated pattern analysis (UMPA), was developed, which lifts previous constraints of SBI. UMPA allows for tuning of the sensitivity and spatial resolution by adjusting the scan and reconstruction parameters. It is applicable not only to random speckle, but also periodic interference patterns, bridging the gap and improving the performance of both speckle-and single-grating-based techniques.Following the first demonstration of UMPA, its potential for a range of applications is illustrated in this thesis. It is shown that UMPA can be employed for X-ray optics characterisation to quantify aberrations in the focussing behaviour of X-ray refractive lenses with high precision and accuracy. UMPA phase tomography is applied to the field of biomedical imaging for high-sensitivity three-dimensional (3D) virtual histology of unstained, hydrated soft tissue, giving unprecedented structural and quantitative density information.Further developments of SBI explored in this thesis include the testing of novel customisable speckle diffusers, the extension of SBI to higher X-ray energies for geology and materials science applications, and the demonstration of UMPA at a laboratory X-ray source. These progresses promise new possibilities of SBI for high-sensitivity, robust and high-throughput imaging in previously inaccessible fields and make SBI accessible to a wider range of users in research and industry.

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Section: Phase-stepping Scan and Signal Extractionmentioning

confidence: 99%

X-ray Phase-Contrast Imaging Using Near-Field Speckles

Zdora¹

2021

Springer Theses

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“…[21][22][23][24] They have mainly attempted to increase the height to pitch ratio (aspect ratio) or field of view of gratings but realizing both goals at the same time has posed severe difficulties. [25][26][27][28][29] In fact, the smaller the pitch of these gratings, the more the fabrication process becomes difficult in electroforming since achieving a uniform and relatively defect-free pattern requires considerable time and cost. Especially high x-ray energies demand higher aspect ratios and therefore, producing high yield gratings in desired large size is still challenging, even for large pitches.…”

Section: Introductionmentioning

confidence: 99%

Edge-illumination x-ray phase contrast imaging with Pt-based metallic glass masks

Saghamanesh

Aghamiri

Olivo

et al. 2017

Review of Scientific Instruments

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Edge-illumination x-ray phase contrast imaging (EI XPCI) is a non-interferometric phase-sensitive method where two absorption masks are employed. These masks are fabricated through a photolithography process followed by electroplating which is challenging in terms of yield as well as time-and cost-effectiveness. We report on the first implementation of EI XPCI with Pt-based metallic glass masks fabricated by an imprinting method. The new tested alloy exhibits good characteristics including high workability beside high x-ray attenuation. The fabrication process is easy and cheap, and can produce large-size masks for high x-ray energies within minutes. Imaging experiments show a good quality phase image, which confirms the potential of these masks to make the EI XPCI technique widely available and affordable. Published by AIP Publishing. [http://dx

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X-ray Single-Grating Interferometry

Zdora

2021

X-Ray Phase-Contrast Imaging Using Near-Field Speckles

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High aspect ratio, Large area silicon-based gratings for X-ray phase contrast imaging

Cited by 6 publications

References 10 publications

X-ray Phase-Contrast Imaging Using Near-Field Speckles

X-ray Phase-Contrast Imaging Using Near-Field Speckles

Edge-illumination x-ray phase contrast imaging with Pt-based metallic glass masks

X-ray Single-Grating Interferometry

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