High-accuracy measurement for radius of curvature and its uncertainties

Zhi-hui, 田志辉 Tian; Zhenguang, 史振广 Shi; Wei-qi, 刘伟奇 Liu; Huaijiang, 杨怀江 Yang; Yongxin, 隋永新 Sui

doi:10.3788/ope.20132110.2495

Cited by 3 publications

(2 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Thus, a high-quality surface or a suitable and highly precise test method is necessary [1,2]. Ritchey-Common (R-C) method is commonly used and effective for testing optical flat mirror surfaces of large aperture [3][4][5][6]. The R-C test requires a good sphere with a diameter that is approximately 1.3 times larger than that of the test flat used as a reference [7,8].…”

Section: Introductionmentioning

confidence: 99%

Influence of reference sphere on test accuracy of Ritchey–Common method

Zhu,

Zhang

2024

IET Optoelectronics

View full text Add to dashboard Cite

The authors analyse the influence of reference sphere on the test accuracy of Ritchey–Common method during testing of flat mirror surface. A simulation model is established to simulate the influence of different radii of curvature of reference sphere on system wavefront. Then, the difference between the flat mirror surface result with reference sphere surface error to the actual flat mirror surface is examined by this model. The test accuracy of flat mirror result can be effectively improved by eliminating the influence of the surface error of reference sphere. When the surface accuracy of the reference sphere is better than 0.01 λ, the influence on RMS test accuracy is within 0.01 λ. R–C test path is built to test a 100 mm‐diameter flat mirror surface, and its results are compared with those of the flat mirror surface without surface error of reference sphere and with the test result of the interferometer. When the surface accuracy of the actual used area of reference sphere is better than 0.01 λ, the effect on flat mirror RMS accuracy is within 0.01 λ. The RMS test accuracy can reach 0.01 λ, when the surface error of reference sphere is retained. The experiment verifies the correctness of the simulation results and guarantees the improvement in the test accuracy of R–C method.

show abstract

Section: Introductionmentioning

confidence: 99%

Influence of reference sphere on test accuracy of Ritchey–Common method

Zhu,

Zhang

2024

IET Optoelectronics

View full text Add to dashboard Cite

show abstract

“…Laser tracker with laser interferometer method is always used in low accuracy and large radius of curvature measurement. Cat's eye and confocal method based on dual-frequency laser interferometer and Fizeau interferometer is suitable for high precision applications since it is non-contact and high accuracy [5]- [7].…”

Section: Introductionmentioning

confidence: 99%

Measuring Method of Radius of Curvature Based on Dual-Frequency Laser Interferometer

Zhang¹,

Liu²,

Liu³

2016

OPJ

View full text Add to dashboard Cite

In order to achieve high-accuracy measurement of radius of curvature of optical sphere, ultra-high accuracy radius of curvature testing device is developed by dual-frequency laser interferometer and Fizeau interferometer based on cat's eye and confocal method. Through analyzing the error source models of radius of curvature testing, optical configuration of the testing device has been optimized. Precise environment control and real-time monitoring system is also established to reduce the errors caused by environment. Through the above processes, the radius of curvature measurement relative accuracy is better than 2 ppm. One optical sphere, R88.5 mm, test aperture 59 mm, has been tested. Testing result is 88499.465 ± 0.176 μm, meeting the design requirement. The method has high accuracy and practical advantages.

show abstract