High accuracy laser diffractometer: angle-scale traceability by the error separation method with a grating

In this work we have studied the feasibility of DNA origami nanostructures as dimensional calibration standards for atomic force microscopes (AFMs) at the nanometre scale. The stability of the structures and repeatability of the measurement have been studied, and the applicability for calibration is discussed. A cross-like Seeman tile (ST) was selected for the studies and it was found suitable for repeatable calibration of AFMs. The height of the first height step of the ST was 2.0 nm. Expanded standard uncertainty (k = 2) of the measurement Uc was 0.2 nm. The width of the ST was 88 nm and width of its arm was 28 nm with Uc = 3 nm. In addition, prepared dry samples were found out to be stable at least for 12 months.

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“…XY-scales were calibrated using grating pitch standards. The standards were calibrated with MIKES laser diffractometer [31].…”

Section: Measurement Instrument and Traceabilitymentioning

confidence: 99%

DNA origami structures as calibration standards for nanometrology

Korpelainen

Linko

Seppä

et al. 2017

Meas. Sci. Technol.

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“…In the traditional laser diffraction method, a grating period can be evaluated by measuring the angle of diffraction when the Littrow configuration is established (Korpelainen et al, 2009). A schematic of the optical setup for the laser diffraction method is shown in Fig.…”

Section: Principle Of the Proposed Femtosecond Laser Diffraction Methodsmentioning

confidence: 99%

Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam

Shimizu

Uehara

Matsukuma

et al. 2018

JAMDSM

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This paper presents a newly proposed method referred to as the femtosecond laser diffraction method for measurement of the grating period. The proposed method is established in such a way that a mode-locked femtosecond laser beam is employed as a light source for the traditional laser diffraction method, in which the Littrow configuration is utilized to evaluate grating period. Since the optical modes in a mode-locked laser, which are often referred to as the optical frequency comb, have deterministic mode frequencies with equal intervals in frequency domain, multiple diffracted beams in the same diffraction order can be obtained. By utilizing the number of Littrow angles obtained from the multiple diffracted beams in the same diffraction order, highly accurate measurement of the grating period can be expected. In this paper, as the first step of research, a prototype optical setup with a mode-locked femtosecond laser source is developed, and some basic experiments are carried out to demonstrate the feasibility of proposed method.

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“…Reference values for the comparison are the pitch values measured with the MIKES laser diffractometer [4]. MIKES has participated in an international comparison for 1D gratings [5].…”

Section: Reference Valuementioning

confidence: 99%

“…The NMIs-the Centre for Metrology and Accreditation (MIKES, Finland), Technical Research Institute of Sweden (SP, Sweden), Justervesenet (JV, Norway) and Metrosert (Estonia)-organized this comparison measurement (Nordic-nano1) for scanning electron microscopes (SEM) and atomic force microscopes The comparison samples were 1D gratings with nominally 300 and 700 nm pitches. The reference values were measured with the MIKES laser diffractometer [4]. The participants were asked to estimate their measurement uncertainty.…”

Section: Introductionmentioning

confidence: 99%

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Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe

Seppä¹,

Korpelainen²,

Bergstrand³

et al. 2014

Meas. Sci. Technol.

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An intercomparison of lateral scales of scanning electron microscopes (SEM) and atomic force microscopes (AFM) in various research laboratories in Northern Europe was organized by the local national metrology institutes. In this paper are presented the results of the comparison, with also an example uncertainty budget for AFM grating pitch measurement. Grating samples (1D) were circulated among the participating laboratories. The participating laboratories were also asked about the calibration of their instruments. The accuracy of the uncertainty estimates seemed to vary largely between the laboratories, and for some laboratories the appropriateness of the calibration procedures could be considered. Several institutes (60% of all results in terms of En value) also had good comprehension of their measurement capability. The average difference from reference value was 6.7 and 10.0 nm for calibrated instruments and 20.6 and 39.9 nm for uncalibrated instruments for 300 nm and 700 nm gratings, respectively. The correlation of the results for both nominally 300 and 700 nm gratings shows that a simple scale factor calibration would have corrected a large part of the deviations from the reference values.

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High accuracy laser diffractometer: angle-scale traceability by the error separation method with a grating

Cited by 19 publications

References 21 publications

DNA origami structures as calibration standards for nanometrology

DNA origami structures as calibration standards for nanometrology

Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam

Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe

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