Hidden Equipment Productivity Opportunities in Semiconductor Fabrication Operations

Kalir, Adar A.; Nahum, Yair; Sharon, Andy

doi:10.1109/tsm.2013.2265713

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2018

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“…Because of the high complexity of production equipment and the large number of equipment units, performance monitoring for production equipment in Fabs is a challenge and also has been an attractive research topic for years [22][23][24][25][26][27]. In addition, wafer lots in modern Fabs become much heavier; the automated material handling system (AMHS) has been the main stream on the shop floor for a long time.…”

Section: Introductionmentioning

confidence: 99%

A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation

Hsieh

Hsieh²

2018

Processes

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Equipment throughput is one of the most critical parameters for production planning and scheduling, which is often derived by optimization techniques to achieve business goals. However, in semiconductor manufacturing, up-to-date and reliable equipment throughput is not easy to estimate and maintain because of the high complexity and extreme amount of data in the production systems. This article concerns the development and implementation of a throughput management system tailored for a semiconductor wafer fabrication plant (Fab). A brief overview of the semiconductor manufacturing and an introduction of the case Fab are presented first. Then, we focus on the system architecture and some concepts of crucial modules. This study also describes the project timescales and difficulties and discusses both tangible and intangible benefits from this project.

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