“…Air tight fittings are mounted on both sides of the quartz tube. During aerosol generation, an argon stream of 0.03 to 0.1 1pm flows through a flask containing Si(OC 2 H 5 ) 4 , silicon tetraethoxide (STE), kept in an ice bath at ice temperature, to carry STE vapor out to the quartz tube, jointing with a diluting argon stream to make up 0.5 lpm as a reaction gas stream. As the reaction gas stream flows through the heating zone at 800°C, STE vapor thermally decomposes to form SiO 2 aerosol via the reaction (Si(OC 2 H 5 ) 4(g) 3 SiO 2(g) ϩ 4 C 2 H 4(g) ϩ 2 H 2 O (g) ).…”