Heterogeneous Integration of a 300-mm Silicon Photonics-CMOS Wafer Stack by Direct Oxide Bonding and Via-Last 3-D Interconnection

McDonough, Colin; Tulipe, Doug La; Pascual, Dan; Tariello, Paul; Mucci, John; Smalley, M.; Nguyen, A. D.; Vo, Tuan; Johnson, Corbet; Nguyễn, Phụng Anh; Hebding, Jeremiah; Leake, Gerald; Moresc, Michele; Timurdogan, Erman; Stojanović, Vladimir; Watts, Michael R.; Coolbaugh, Douglas

doi:10.4071/imaps.494

Cited by 4 publications

(2 citation statements)

References 10 publications

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“…A demonstration of the TOV technology enabled on-chip photonic transmit and receive modules which were used in a 5 Gb/s link consuming 250 fJ/bit, including the onchip optical power [31]. The yield of the TOV process is nearly 100% [32].…”

Section: B Electronic-photonic Integrationmentioning

confidence: 99%

A Review of Electronic-Photonic Heterogeneous Integration at DARPA

Heidel

Usechak

Dohrman

et al. 2016

IEEE J. Select. Topics Quantum Electron.

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The Defense Advanced Research Projects Agency (DARPA) has developed programs in integrated photonics for over a decade. From the Electronic-Photonic Integrated Circuits (EPIC) program to the more recent Electronic-Photonic Heterogeneous Integration (E-PHI) program, DARPA programs have established a library of high performance silicon photonic devices and have demonstrated heterogeneous integration processes. These components and integration techniques, combined with automated design software tools, form the basis of the new American Institute for Manufacturing Integrated Photonics (AIM Photonics) which will establish a photonics manufacturing ecosystem in the United States through a combination of public and private funds. Index Terms-integrated photonics, heterogeneous integration, 1077-260X (c)

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Section: B Electronic-photonic Integrationmentioning

confidence: 99%

A Review of Electronic-Photonic Heterogeneous Integration at DARPA

Heidel

Usechak

Dohrman

et al. 2016

IEEE J. Select. Topics Quantum Electron.

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“…The beam-steering optical phased array heterogeneously integrated with CMOS driving electronics and the single-chip coherent LiDAR with integrated optical phased arrays and CMOS receiver electronics were both fabricated at SUNY Poly in a novel 3D-integrated electronics-photonics platform [69], as shown in Fig. 2.9a.…”

Section: Platformmentioning

confidence: 99%

Integrated optical phased arrays: augmented reality, LiDAR, and beyond

Notaros

2023

AI and Optical Data Sciences IV

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Integrated optical phased arrays, fabricated in advanced silicon-photonics platforms, enable manipulation and dynamic control of free-space light in a compact form factor, at low costs, and in a non-mechanical way. As such, integrated optical phased arrays have emerged as a promising technology for many wide-reaching applications, including LiDAR sensors and augmented-reality displays. In this thesis, novel integratedoptical-phased-array devices, systems, results, and applications are presented. First, beam-steering optical phased arrays for LiDAR are shown, including the first beam-steering optical phased arrays powered by monolithically-integrated onchip rare-earth-doped lasers, the first beam-steering optical phased arrays controlled using heterogeneously-integrated CMOS driving electronics, and the first single-chip coherent LiDAR with integrated optical phased arrays and CMOS receiver electronics. These demonstrations are important steps towards practical commercialization of lowcost and high-performance integrated LiDAR sensors for autonomous vehicles. Next, integrated optical phased arrays for optical manipulation in the near field are developed, including the first near-field-focusing integrated optical phased arrays, the first quasi-Bessel-beam-generating integrated optical phased arrays, and a novel active butterfly architecture for independent amplitude and phase control. These near-field modalities have the potential to advance a number of application areas, such as optical trapping for biological characterization, trapped-ion quantum computing, and laser-based 3D printing. Finally, a novel transparent integrated-phased-array-based holographic display is proposed as a highly-discreet and fully-holographic solution for the next generation of augmented-reality head-mounted displays; novel passive near-eye displays that generate holograms, the first integrated visible-light liquid-crystal-based phase and amplitude modulators, and the first actively-tunable visible-light integrated optical phased arrays are presented.

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