Heterogeneous Integration for Hybrid Acoustic Devices: Gan/Cu/Yig Magnetoelastic Hbars

Abstract

This work presents the heterogeneous integration of thin film acoustic devices using micro-transfer printing (MTP). Our approach enables the transfer of a high quality acoustic transducer grown epitaxially on a source substrate (6H-SiC), onto a target substrate that is not compatible with epitaxy [here, yttrium iron garnet (YIG)], with no degradation in measured RF/acoustic performance. The resulting integrated device is a magnetoelastic high overtone bulk acoustic resonator (ME-HBAR), which can hybridize acoustic and spin waves (phonons and magnons). We describe the MTP process, along with RF/acoustic and magnetoelastic characterization of the ME-HBAR.