“…Currently, silicon-based 3D integrated electronic systems are commercially available. 44,45 In addition, low-dimensional nanostructures (e.g., nanowires, nanorods, and nanosheets) offer several notable benefits at nanoscale dimensions (e.g., a high surface-to-volume ratio, quantum confinement effects, and tunable properties), and they could serve as means to overcome the limitations of traditional planar device architectures and enable the integration of diverse materials and functionalities in monolithic 3D (M3D) devices or systems. Leveraging the unique properties, vertical growth direction, and tunability of low-dimensional nanostructures makes them indispensable for advancing 3D device integration and unlocking new possibilities in electronics, 40,46 optoelectronics, 2,47 energy storage, 48 and beyond.…”