Abstract. Undoped and holmium-doped ZnO thin films were obtained, using the sol-gel method. The films were characterized by scanning electron microscopy (SEM), Hall effect measurements, electron paramagnetic resonance (EPR) spectroscopy and superconducting quantum interference device -vibrating sample magnetometry (SQUID-VSM). The Hall effect measurements have indicated a n-type conduction with a resistivity of about 3.2 Ω.cm for the undoped ZnO and of about 4.5 Ω.cm for the 5 at. % Ho-doped ZnO thin films. The EPR measurements have indicated the presence of interstitial zinc in the undoped ZnO and the presence of zinc vacancies in 5 at. % Ho-doped ZnO. Ho (5 at. %)-doped ZnO films exhibit superparamagnetism at 5 K, while a low paramagnetic behavior was observed at room temperature.