2022
DOI: 10.1109/jsen.2022.3214337
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Hermetic and Bioresorbable Packaging Materials for MEMS Implantable Pressure Sensors: A Review

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Cited by 8 publications
(5 citation statements)
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“…Organic polymers such as epoxy resin [ 239 ], polyimide [ 240 ], offer good insulation properties, low dielectric constant, making them suitable for insulated package. Glass is often used in optical packaging due to its excellent light transmission characteristics and chemical stability [ 241 ]. It helps protect internal optical components while allowing light to pass through effectively.…”
Section: Methodsmentioning
confidence: 99%
“…Organic polymers such as epoxy resin [ 239 ], polyimide [ 240 ], offer good insulation properties, low dielectric constant, making them suitable for insulated package. Glass is often used in optical packaging due to its excellent light transmission characteristics and chemical stability [ 241 ]. It helps protect internal optical components while allowing light to pass through effectively.…”
Section: Methodsmentioning
confidence: 99%
“…Therefore, evaluating the comprehensive situation of various preparation methods is the top priority for researchers. We have consulted a large number of articles and conducted in-depth evaluations on the preparation of triboelectric sensors using 3D printing [106][107][108][109][110][111][112], MEMS technology [41,[113][114][115][116][117][118][119][120], textile processes [64,[121][122][123][124][125][126][127], template-assisted methods [128][129][130][131][132][133][134], and materials synthesis methods [86,87,[135][136][137][138]. We have proposed evaluating the various benefits of various preparation processes, including material selection (figure 8 In terms of material selection, we evaluate it from the aspects of material type, material properties, ability to prepare microstructures, ability to doped, and sustainability; in terms of technical maturity, we mainly evaluate from application cases, standardization and normalization, process stability, technology iteration speed, and industry recognition; in terms of process difficulty, we mainly evaluate the batch production capacity, complexity of process flow, difficulty in parameter control, difficulty in material processing, and yield rate; in terms of preparation efficiency, we mainly evaluate production speed, automation level, batch production capacity, process cycle time, and material utilizat...…”
Section: Concluding Remarks and Future Perspectivesmentioning
confidence: 99%
“…Examples of such materials include bioresorbable poly(l-lactide) and glycine [ 156 ]. Future directions include in-depth biocompatibility testing, standardization of safety guidelines, and the development of sensor integration methods that ensure safe and reliable operation in healthcare and biomedical applications [ 157 ].…”
Section: Challenges and Future Directionsmentioning
confidence: 99%