“…Among the reported techniques, the 3 He(d, a) 1 H Nuclear Reaction Analysis method (NRA) has the highest depth resolution for the detection of aparticles. This technique has been successfully applied for the profiling of 3 He in near-surface layers (<0.3 lm), where the 3 He(d, a) 1 H cross-section can be considered as constant [9][10][11]. For larger depth, its sensitivity is deteriorated by the presence of large sources of background.…”