2023
DOI: 10.1016/j.matchemphys.2022.126998
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Helium and strontium co-implantation into SiC at room temperature and isochronal annealing: Structural evolution of SiC and migration behaviour of strontium

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Cited by 6 publications
(9 citation statements)
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“…Likewise, in the study by Li et al [ 22 ] Fe atoms were found to be trapped in cavities and forming clusters within them. Similar trapping was also observed for Ag co-implntated with He at RT after annealing at 1100 °C for 5 h [ 12 ] and for Ag and He co-implanted into SiC after annealing at 1000 °C for 5 h [ 25 ].…”
Section: Resultssupporting
confidence: 67%
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“…Likewise, in the study by Li et al [ 22 ] Fe atoms were found to be trapped in cavities and forming clusters within them. Similar trapping was also observed for Ag co-implntated with He at RT after annealing at 1100 °C for 5 h [ 12 ] and for Ag and He co-implanted into SiC after annealing at 1000 °C for 5 h [ 25 ].…”
Section: Resultssupporting
confidence: 67%
“…The appearance of D and G peaks in the annealed triple implanted sample is due to the presence of helium. Mokgadi et al [ 25 ] observed similar phenomenon in the annealed SiC co-implanted with Sr and He at room temperature. It was found that Si and C interstitials migrate and agglomerate into clusters around He bubbles after annealing, which could be the reason for the intense G and D bands observed in the sample annealed at 1000 °C.…”
Section: Resultsmentioning
confidence: 64%
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