Heights integrated model as instrument for simulation of hydrodynamic, radiation transport, and heat conduction phenomena of laser-produced plasma in EUV applications.

Sizyuk, V.; Hassanein, A.; Morozov, Vitali; Sizyuk, T.

doi:10.2172/932939

Cited by 10 publications

(13 citation statements)

References 49 publications

(48 reference statements)

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“…The HFS and CRE models are used to calculate the ion and electron composition and optical properties of nitrogen plasma for various densities and temperatures. The data are tabulated and used in the HEIGHTS package [27][28][29] to model the radiative transport. HEIGHTS package is a set of multipurpose, multiphase, multidimensional computational tools that integrate magnetohydrodynamics (MHD), thermal conduction, atomic and plasma physics, photon transport, and material erosion processes.…”

Section: Plasma Hydrodynamics and Conversion Efficiencymentioning

confidence: 99%

“…Currently, HEIGHTS package has numerous integrated models including 3D laser energy deposition and material bulk thermal response, surface melt-layer formation and movement, 3D gas and plasma MHD, and 3-D line and continuum photon radiation transport. 28 HEIGHTS package has been extensively used for estimating the plasma properties as well as the emission efficiency of 13.5 nm plasma sources generated by lasers and discharges. 34,35 Based on the developed physical and mathematical models, HEIGHTS allows complete simulation of LPP evolution and WW photon production.…”

Section: Plasma Hydrodynamics and Conversion Efficiencymentioning

confidence: 99%

“…In this article, we investigated the atomic and optical properties of nitrogen plasmas along with the effect of laser wavelength on WW conversion efficiency using the HEIGHTS simulation package. [27][28][29] We systematically compared the WW emission features from laser plasmas produced by three Nd:YAG wavelengths (1064 nm, 532 nm, and 266 nm). The calculated spectra were visually compared to experimentally recorded spectra from a nitrogen gas jet target as well as emission from boron-nitride (BN) plasma.…”

Section: Introductionmentioning

confidence: 99%

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Effects of excitation laser wavelength on Ly-α and He-α line emission from nitrogen plasmas

et al. 2013

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Laser-produced nitrogen plasmas emitting radiation at 2.48 nm (Ly-α) and 2.88 nm (He-α) are considered potential efficient sources for water-window (WW) microscopy. The atomic and optical properties of nitrogen plasma and influence of the laser wavelength on the line emission in the WW range are investigated. It is found that the optimal temperatures for maximum emission from Ly-α and He-α spectral lines are 40-60 eV and 80-100 eV, respectively. The WW line emission and the conversion efficiency (CE) are estimated for three distinct Nd:YAG laser wavelengths (1064 nm, 532 nm, and 266 nm). The calculated CEs are compared with experimentally observed CE values. It is found that 1064 nm wavelength provides the highest CE from laser to Ly-α and He-α radiation.

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Section: Plasma Hydrodynamics and Conversion Efficiencymentioning

confidence: 99%

Section: Plasma Hydrodynamics and Conversion Efficiencymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Effects of excitation laser wavelength on Ly-α and He-α line emission from nitrogen plasmas

et al. 2013

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“…Heat conduction in plasma is developed using an implicit algorithm of the sparse matrix technology [24,25]. The radiation transport based on the weighted Monte Carlo method is previously described and benchmarked in detail for laser and discharge plasma [26][27][28].…”

Section: Mathematical and Physical Modelsmentioning

confidence: 99%

“…The magnetic fields time step variation B n was used for correction of the MHD system in equation (2). This MHD equation system is solved using the TVD-LF algorithm described in [23,27,30]. Used in this numerical scheme the maximum propagation speed of information (see [30] for details) for the tokamak divertor case is given as…”

Section: Mathematical and Physical Modelsmentioning

confidence: 99%

Damage to nearby divertor components of ITER-like devices during giant ELMs and disruptions

Sizyuk

Hassanein

2010

Nucl. Fusion

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During normal operation of the high confinement mode in future ITER devices, edge-localized modes (ELMs) are a potential threat to the divertor components lifetime and plasma contamination. To predict the outcome of the direct ELM plasma impact on the divertor plate, conversion of plasma energy into radiation in the shielding layer, and then the resulting energy deposition of radiation flux to the surrounding areas, comprehensive physical and numerical models are developed and implemented in the HEIGHTS package. The energy deposition, divertor material erosion, resulting vapour plasma temperature and density evolution, and subsequently the resulting radiation, its transport and deposition around the divertor area are calculated for the predicted ELM and disruption parameters and for the prospective full ITER geometry. The initial simulation results showed that the disrupted plasma power density at the original divertor location and vapour radiation fluxes on nearby dome locations can have the same order of magnitude. The simulation results of the integrated modelling indicate a significant potential damage of the divertor nearby surfaces during giant ELMs and disruption impacts for ITER-like parameters and geometry.

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The effect of excitation wavelength on dynamics of laser-produced tin plasma

Harilal¹,

Sizyuk²,

Hassanein³

et al. 2011

Journal of Applied Physics

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We investigated the effect of the excitation wavelength on the density evolution of laser-produced tin plasmas, both experimentally and numerically. For producing plasmas, Sn targets were excited with either 10.6 lm CO 2 laser or 1.06 lm Nd:yttrium aluminum garnet laser; both are considered to be potential excitation lasers for extreme ultraviolet lithography laser-produced plasma light sources. The electron density of the plasma during the isothermal expansion regime was estimated using an interferometric technique. The Stark broadening of isolated singly-ionized emission was employed for deducing the density during the plasma adiabatic expansion regime. Our results indicate that the excitation source wavelength determines the initial density of the plasma, as well the plume expansion dynamics. Numerical simulation using HEIGHTS simulation package agrees well with the experimentally measured density profile. V

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Heights integrated model as instrument for simulation of hydrodynamic, radiation transport, and heat conduction phenomena of laser-produced plasma in EUV applications.

Cited by 10 publications

References 49 publications

Effects of excitation laser wavelength on Ly-α and He-α line emission from nitrogen plasmas

Effects of excitation laser wavelength on Ly-α and He-α line emission from nitrogen plasmas

Damage to nearby divertor components of ITER-like devices during giant ELMs and disruptions

The effect of excitation wavelength on dynamics of laser-produced tin plasma

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