graded coatings were fabricated on China low activation martensitic steel and silicon substrates by RF magnetron sputtering. The coating composition and cross-section morphologies were investigated using X-ray photoelectron spectroscopy, Auger electron spectroscopy and field-emission scanning electron microscopy. The mechanical properties of the coatings were studied using nanoindentation, wafer-curvature measurements and microscratch tests. The results show that usable Al 2 O 3 -Al graded coatings could be fabricated. With a more continuous compositional gradient, the interface zone was more compact. The hardness and elastic modulus of Al 2 O 3 -Al graded coatings were less than those of Al 2 O 3 coatings, but greater than those of Al 2 O 3 /Al coatings. After annealing at 773 K for 3 h, the hardness of Al 2 O 3 -Al graded coating showed a small increase. The residual stresses in Al 2 O 3 -Al graded coatings declined to about 0.3 GPa, compared with the 6.6 GPa for Al 2 O 3 coating. The adhesion of Al 2 O 3 was improved by deposition of Al or Al compositional gradient oxide layers.