Heavily boron doped nano-crystalline diamond growth by MW-LA-PECVD

Taylor, Andy; Ashcheulov, Petr; Hubı́k, P.; Klimša, Ladislav; Kopeček, Jaromı́r; Živcová, Z. Vlčková; Remzova, Monika; Kavan, Ladislav; Beltrán, Ana M.

doi:10.13140/rg.2.2.12653.23527

2017

DOI: 10.13140/rg.2.2.12653.23527

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Heavily boron doped nano-crystalline diamond growth by MW-LA-PECVD

Andy Taylor¹,

Petr Ashcheulov²,

P. Hubı́k³

et al.

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Heavily boron doped nano-crystalline diamond growth by MW-LA-PECVD

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