Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled <i>CF</i>4 discharge

Zhang, Quan‐Zhi; Wang, You‐Nian; Bogaerts, Annemie

doi:10.1063/1.4882297

Cited by 23 publications

(14 citation statements)

References 31 publications

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“…This means an auxiliary DC discharge at chamber center will give rise to a lot of ionization and the nonlinear enhancement of electron density in the bulk. This process may be similar to the seed electron effect of atmosphere atmospheric discharge [43] and the density enhancement effect in DC superposed CCP discharge [44][45][46][47][48]. Kawamura et al [41,49] and Zhang et al [47] reported simulation results of DC superposed CCP discharge, and found that DC discharge can significantly improve electron density, which is consistent with the experimental phenomenon of our experiment.…”

Section: Dc+rf Hybrid Dischargesupporting

confidence: 91%

Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

Hua¹,

Song²,

Hao³

et al. 2018

Plasma Sci. Technol.

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Experimental results of a direct current enhanced inductively coupled plasma (DCE-ICP) source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported. With the use of this new source, the plasma characteristic parameters, namely, electron density, electron temperature and plasma uniformity, are measured by Langmuir floating double probe. It is found that DC discharge enhances the electron density and decreases the electron temperature, dramatically. Moreover, the plasma uniformity is obviously improved with the operation of DC and radio frequency (RF) hybrid discharge. Furthermore, the nonlinear enhancement effect of electron density with DC+RF hybrid discharge is confirmed. The presented observation indicates that the DCE-ICP source provides an effective method to obtain high-density uniform plasma, which is desirable for practical industrial applications.

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Section: Dc+rf Hybrid Dischargesupporting

confidence: 91%

Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

Hua¹,

Song²,

Hao³

et al. 2018

Plasma Sci. Technol.

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“…此外, 一些研究还表明裁剪波形可以调控放电中中性成分的密度 [124] . 除了单纯的裁剪波导致的电非对称效应, 电非对称效应与几何非对称效应 [125−127] 以及磁非对称效应的耦合等 [14,16,128] 均逐渐被提出及研究, 开展并深入相关的研究能够为加深对CCP放电过程的理解以及更好地实现对实际工艺中等离子体参数的控制提供很大的帮助.…”

Section: 总之近些年的大量研究都表明利用裁剪波形unclassified

Electron heating dynamics and plasma parameters control in capacitively coupled plasma

Wang¹,

Wen²,

Tian³

et al. 2021

Acta Phys. Sin.

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Capacitively coupled plasma (CCP) has gain wide attention due to its important applications in industry. The researches of CCP mainly focus on the discharge characteristics and plasma parameters under different discharge conditions to obtain a good understanding of the discharge, find good methods of controlling the charged particle properties, and improve the process performance and efficiency. The controlling of plasma parameters is based on the following three aspects: gas, chamber, and power source. Changing these discharge conditions can directly influence the sheath dynamics and the charged particle heating process, which can further influence the electron and ion distribution functions, the plasma uniformity, and the production of neutral particles, etc. Based on a review of the recent years’ researches of CCP, the electron heating dynamics and several common methods of controlling the plasma parameters, i.e. voltage waveform tailoring, realistic secondary electron emission, and magnetized capacitively coupled plasma are introduced and discussed in detail in this work.

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“…They found that the electric field in the plasma bulk is striated and electrons are accelerated within these striated fields when some certain conditions are met in CF 4 gas discharges. Indeed, lots of related numerical [23,24] and experimental [25,26] studies have been focused on the electron heating mechanisms in both electronegative or electropositive CCPs, for which, the discharge modes and mode transitions [27][28][29] dependent on different external parameters are always studied as the important considerations. Generally, at low pressures or voltages, the discharge is always sustained in α-mode and would transfer to be in γ-mode with increasing pressure and voltage.…”

Section: Introductionmentioning

confidence: 99%

Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges

Wang

Wen

Zhang

et al. 2019

Plasma Sources Sci. Technol.

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Self-organized striated structure has been observed experimentally and numerically in CF 4 plasmas in radio-frequency capacitively coupled plasmas (RF CCPs) recently (Liu et al 2016 Phys. Rev. Lett. 116 255002). In this work, the striated structure is investigated in a capacitively coupled oxygen discharge with the introduction of the effect from the secondary electron emission, based on a particle-in-cell/Monte Carlo collision model (PIC/MCC). As we know, the transport of positive and negative ions plays a key role in the formation of striations in electronegative gases, for which, the electronegativity needs to be large enough.As the secondary electron emission increases, electrons in the sheaths gradually contribute more ionization to the discharge. Meanwhile, the increase of the electron density, especially in the plasma bulk, leads to an increased electrical conductivity and a reduced bulk electric field, which would shield the ions' mobility. These changes result in enlarged striation gaps.And then, with more emitted electrons, obvious disruption of the striations is observed accompanied with a transition of electron heating mode. Due to the weakened field, the impact ionization in the plasma bulk is attenuated, compared with the enhanced ionization caused by secondary electrons. This would lead to the electron heating mode transition from striated (STR) mode to γ-mode. Besides, our investigation further reveals that γ-mode is more likely to dominate the discharge under high gas pressures or driving voltages.

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Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF4 discharge

Cited by 23 publications

References 31 publications

Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

Electron heating dynamics and plasma parameters control in capacitively coupled plasma

Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges

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