Heat transfer analysis on wafer annealing process in semiconductor multi-wafer furnace using CFD simulation

Tan, Siew Aun; Yu, Kok Hwa; Abdullah, M. Z.

doi:10.1007/s12206-022-0545-4

Cited by 4 publications

(1 citation statement)

References 17 publications

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“…Díaz-Ovalle et al [27] reported that the baffle plate geometry in an electrical convective furnace could have an important influence on the temperature uniformity of the furnace and the preheating time of the furnace. Using a 3D numerical model, Tan et al [28] simulated the heat transfer during annealing in a vertical furnace to recommend design changes that would improve thermal uniformity across the stacked wafers. In the simulation, it was found that the heat loss at the process door was greater than the heat loss at the top header.…”

Section: Introductionmentioning

confidence: 99%

Influence of Spacers and Skid Sizes on Heat Treatment of Large Forgings within an Industrial Electric Furnace

et al. 2023

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The influence of stacking patterns, through the different spacer and skid sizes, on the transient temperature distribution uniformity of large-size forgings in a 112-m3 electrical heat treatment furnace was investigated by conducting CFD simulations and real-scale experimental validation. A 3D CFD model of the electrical furnace was generated, including a heat-treating chamber, axial flow fans, large size blocks, skids, and spacers. Real-scale temperature measurements on instrumented test blocks during the heat treatment process were carried out to validate the CFD simulations. Results indicated that the CFD model was capable enough to determine the transient temperature evolution of the blocks with a maximum average deviation of about 6.62% compared to the experimental measurements. It was found that significant temperature non-uniformities of up to 379 K on the surfaces of the blocks due to the non-optimum stacking pattern were experienced by the blocks. Such non-uniformities could be reduced between 24% to 32% if well-adapted spacer and skid sizes were used in the stacking configurations. Based on simulation results and experimental validation work, optimum spacer and skid sizes for uniform temperature distribution were proposed for different stacking patterns.

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Section: Introductionmentioning

confidence: 99%