Abstract:A comparison of predictions of a one-dimensional simulation model with the results of a recent experimental study [Appl. Phys. Lett. 76, 544 (2000)] of a dc He–Xe microdischarge is presented. The experimental results are remarkably reproduced by the model but only when unusually high values are used for the unknown rate coefficients of formation and recombination reactions of HeXe+ heteronuclear ions.
“…We noted that for the range of current density studied (abnormal glow regime) the discharge voltages in mixtures of helium and xenon were surprisingly higher than in either pure xenon or pure helium, when the xenon fraction exceeded about 10%. While we originally attributed this to the possible formation of HeXe + ions that have lower secondary emission coefficients, Veronis and Inan 10 have modeled our specific experiment, and concluded that the required rate coefficient for the formation of this species would have to be unacceptably high. In this letter, we have revisited this problem, extending our experiments to mixtures of Xe and Ne, and to a wider range of current densities and pressures, and we show here that we can reproduce the general trends seen experimentally with a onedimensional fluid model by taking into account charge exchange process.…”
Electrical characteristics in the microdischarge experiments of Postel and Cappelli (J. Appl. Phys. 89, 4719, 2001), show that voltages are higher in mixtures of helium and xenon than in pure xenon in the abnormal glow discharge regime. While originally attributed to the possible formation of heterodimer ions which have lower secondary emission coefficients, we show here that we can reproduce the general trends seen experimentally with a onedimensional fluid model by taking into account the charge exchange process, He + + Xe → He + Xe +. The reaction rate coefficient used (10-9 cm 3 .s-1) corresponds to that for ions with energy of around 1 eV, which is not an uncommon energy for ions in the cathode sheath of strongly collisional microdischarges. Experimental results are also presented for mixtures of He, Xe, and Ne, at 50 Torr and 250 Torr.
“…We noted that for the range of current density studied (abnormal glow regime) the discharge voltages in mixtures of helium and xenon were surprisingly higher than in either pure xenon or pure helium, when the xenon fraction exceeded about 10%. While we originally attributed this to the possible formation of HeXe + ions that have lower secondary emission coefficients, Veronis and Inan 10 have modeled our specific experiment, and concluded that the required rate coefficient for the formation of this species would have to be unacceptably high. In this letter, we have revisited this problem, extending our experiments to mixtures of Xe and Ne, and to a wider range of current densities and pressures, and we show here that we can reproduce the general trends seen experimentally with a onedimensional fluid model by taking into account charge exchange process.…”
Electrical characteristics in the microdischarge experiments of Postel and Cappelli (J. Appl. Phys. 89, 4719, 2001), show that voltages are higher in mixtures of helium and xenon than in pure xenon in the abnormal glow discharge regime. While originally attributed to the possible formation of heterodimer ions which have lower secondary emission coefficients, we show here that we can reproduce the general trends seen experimentally with a onedimensional fluid model by taking into account the charge exchange process, He + + Xe → He + Xe +. The reaction rate coefficient used (10-9 cm 3 .s-1) corresponds to that for ions with energy of around 1 eV, which is not an uncommon energy for ions in the cathode sheath of strongly collisional microdischarges. Experimental results are also presented for mixtures of He, Xe, and Ne, at 50 Torr and 250 Torr.
Vacuum ultraviolet emission and electrical characteristics of a simple discharge configuration consisting of two planar cylindrical electrodes operated with a dc voltage have been measured over a wide range of He/Xe mixtures and discharge pressures. Breakdown characteristics are consistent with those found in the literature, however current–voltage characteristics and the inferred discharge resistivity suggest the presence of a complex process controlling electron emission at the cathode. Ultraviolet vacuum emission maps of atomic and molecular xenon at 147, 150, and 173 nm, respectively, have been measured as a function of pressure, from 60 to 500 Torr, and gas mixture, from pure Xe to 5% Xe in He. The calibrated ratios of each emission map help to visualize the zones of strongest ultraviolet emission over a wide range of operating conditions. One-dimensional simulations of the breakdown voltage and current discharge have been performed using the commercially available discharge-modeling package SIGLO. Good agreement with experimental results is found in the case of pure helium and xenon, however, in the case of pure xenon, the gas temperature was adjusted (elevated) in order to reproduce the measured current–voltage characteristics. Modeling of the electron number density distribution indicates that the discharge is principally composed of a thick ion sheath near the cathode.
A one-dimensional, self-consistent, continuum model is used to elucidate plasma phenomena in a parallel-plate dc microdischarge with a 250 μm gap at a pressure of 250 Torr. The microdischarge is found to have a bulk plasma region and a cathode sheath region with sizes that are comparable. Depending on the discharge current densities, peak electron densities of order up to 1014 cm−3 are predicted. Electron temperature of several eV are predicted within the cathode sheath while temperatures between 2 and 3 eV are observed in the bulk plasma. Gas temperatures of the order of 1000 K are predicted, emphasizing the importance of gas heating phenomena in dc microdischarges.
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