He+ implantation for waveguide fabrication in KTP and Rb:KTP

Theoretical modeling and experiment of refractive index change in He+ ion-implanted KTP waveguide

“…Since the 1980s, waveguides in KTP have been fabricated by ion implantation with many different ion species, including light ions such as H [8], He [9][10][11][12][13][14][15], and the heavy or medium ions such as Ni [16], P [17], Li [14,18], Si [19], C [20], etc. Although waveguide phenomena have been observed and measured in these experiments, little work had been done for investigating the mechanism of waveguide formation.…”

Annealing Characters of KTP Crystal Formed with He+-Ions at High Dose and Low Energy

“…At present, waveguides in KTP have been fabricated by both the light ions such as H [8], He [9][10][11][12][13][14][15][16] and the heavy or medium ions such as Ni [17], P [18], Li [15,19], Si [20], or C [21], etc.…”

“…Several experimental results [9,14,[16][17][18][19][20] have shown that the surface refractive index n x and n z in guide region can be increased and waveguide quality can be improved after suitable annealing treatment. In this paper, we will report the KTP crystal implanted by 150KeV He + ions with 8×10 16 ions/cm 2 , and analyze the refractive index profiles in the crystal after a set of thermal annealing under suitable conditions.…”

Depth distribution of oxygen vacancies in 1 MeV Li + -irradiated KTiOPO 4

“…K by Rb) (Bierlein et al 1987, Bierlein andVanherzeele 1989) resulting in an increased refractive index in the ionexchanged layer or (ii) megaelectronvol t ion irradiation with light elements , Wang et al 1996, 1997, Bindner et al 1998, Opfermann et al 1999 provoking a buried amorphized layer with a lowered refractive index.…”