$\hbox{n}^{+}/\hbox{p}^{+}$ Gate Bulk FinFETs With Locally Separated Channel Structure for Sub-50-nm DRAM Cell Transistors

Jung, Hyun-Key; Park, Ki-Heung; Lee, Jong-Ho

doi:10.1109/led.2007.909870

IEEE Electron Device Lett.

2007

DOI: 10.1109/led.2007.909870

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$\hbox{n}^{+}/\hbox{p}^{+}$ Gate Bulk FinFETs With Locally Separated Channel Structure for Sub-50-nm DRAM Cell Transistors

Hyun-Key Jung

Ki-Heung Park

Jong-Ho Lee

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$\hbox{n}^{+}/\hbox{p}^{+}$ Gate Bulk FinFETs With Locally Separated Channel Structure for Sub-50-nm DRAM Cell Transistors

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References 11 publications

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