$$\hbox {Au}^{2+}$$ Au 2 + -Implanted Regions in Silicon Visualized Using a Modulated Free-Carrier Absorption Method

Abstract

Silicon samples were implanted with Au 2+ ions of energy 100 keV and doses of 10 14 cm −2 . The area of the implanted region was 2 mm × 2 mm. The size of the Si substrate samples was 5 mm × 5 mm × 0.4 mm. Spatial distributions of the amplitude and profiles of the modulated free-carrier absorption (MFCA) signal of the implanted silicon samples were recorded and analyzed. The data were obtained using an experimental setup built specifically for MFCA amplitude mapping and measurements of frequency characteristics. For example, the maps and profiles showed that for 520 nm laser illumination, the MFCA amplitude in the implanted region was considerably smaller than that for the substrate. The values of the amplitude of the MFCA signal from the implanted region depended on the wavelength of illuminating light. They convey information related to the optical absorption coefficient of the implanted layers.

Metrology and Measurement Systems

“…A comparison of these methods from the point of view of investigations of recombination parameters in silicon is presented in paper [24]. Both the MFCA and PTR techniques proved appropriate tools for investigating properties of implanted layers [25][26][27][28][29]. Spectroscopic ellipsometry is a well-established optical technique, routinely applied to characterize materials optical and structure properties [30].…”

On Investigations of the Optical Absorption Coefficient of Gold and Germanium Implanted Silicon with the Use of the Non-destructive Contactless Photo Thermal Infrared Radiometry

“…12 In this work we report results of investigations of Au 2+ and Ge + ion-implanted silicon with the Photo Thermal Infrared Radiometry (PTR) method. 13 This method is used for investigations of semiconductor materials like other photoacoustic (PA), [14][15][16][17][18][19][20] photopyroelectric [21][22][23] and Modulated Free Carriers Absorption (MFCA) [24][25][26][27][28] methods. The PTR method has a wide range of different applications in investigations of many types of materials.…”